Canon Kabushiki Kaisha

Manabu Ando

Nobuo Nakamura

Satoshi Yuasa

Yoshiaki Nishimura

Katsuo Kawano

Jyunji Takashita

Masahiko Miyamoto

Kazuo Watanabe

Hirotaka Fuse

Koushi Shinoda

Masahiko Miyamato

Yoshitane Tsuchiya

There is disclosed a polishing apparatus utilizing a gel material as the polishing tool, in which the gel material is rotated in the vicinity of a surface to be polished, or is given rotating and rocking motions in direct contact with the surface to be polished.

Polishing apparatus

A polishing apparatus for polishing a surface of a work piece requiring high surface precision such as an optical component or a metal mold by applying a tool, in which the tool is given a rocking motion of the surface of work to be polished while the work is given a rotary motion. Besides the rotary motion of the work, the rotation and rocking motion of the tool and the movement of the tool on the surface to be polished are detected and are controlled according to the working information for the surface to be polished.

Growing community of inventors

Yokohama, Japan

Manabu Ando