Samsung Electronics Co., Ltd.

Man-young Lee

Hak-song Park

Jae-moon Kim

Yong-Jin Choi

Jung-min Kim

Seung-kun Lee

Young-cheol Kim

Tae-yong Kim

Hyeong-keun An

Jae-mun Kim

Heung-yeol Yeom

Apparatus for and a method of cleaning or processing a wafer anticipates a malfunction of a pump and avoids an abrupt shutting down of the pump during the cleaning or processing of the wafer. The apparatus includes a tank vessel containing a liquid used in the cleaning or processing of the wafer, a pump that pumps the liquid chemical from the vessel, a filter that filters impurities contained in the liquid pumped by the pump, a heater that heats the filtered liquid to a predetermined temperature and supplies the heated liquid back into the tank vessel, and a pump malfunction anticipation unit that operates at the same time as the pump. The pump malfunction anticipation unit calculates the flow rate of the liquid pumped by the pump using a program, and based on the flow rate anticipates when it is time to replace the pump.

Wafer cleaning apparatus with anticipating malfunction of pump

An error correction method and apparatus for correcting multiple errors in received digital data word signals calculates syndromes S.sub.0, S.sub.1, S.sub.2 and S.sub.3 from a block of n received data words and a parity check matrix H. First coefficients .sigma..sub.1 and .sigma..sub.2 are calculated from the derived syndromes and a second coefficient K is calculated from the first coefficients .sigma..sub.1 and .sigma..sub.2. An error location value x.sub.1 is calculated from the second coefficient K, actual error location values X.sub.1 and X.sub.2 are calculated from the value x.sub.1, and error values Y.sub.1 and Y.sub.2 are calculated from the actual error location values X.sub.1 and X.sub.2. The received data words are then corrected by applying the calculated error values Y.sub.1 and Y.sub.2. The error location value x.sub.1 calculator is preferably constituted by logic gates which enable the apparatus to be smaller and faster than those using a conventional ROM table.

Error correction method and apparatus thereof

An operation method and apparatus over Galois Field GF(2.sup.m) using a subfield GF(2.sup.m/2). The operation apparatus includes a conversion circuit for converting the elements represented by a basis of GF(2.sup.m) into the elements represented by a basis of GF(2.sup.m/2); an operation circuit for performing an operation over GF(2.sup.m/2) with respect to the elements represented by the basis of GF(2.sup.m/2); and a reversion circuit for reverting the operated elements represented by the basis of GF(2.sup.m/2) to the elements represented by the basis of GF(2.sup.m), thereby performing high speed operation and simplifying circuit construction.

Operational method and apparatus over GF(2.sup.m) using a subfield GF(2.sup

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Seoul, South Korea

Man-young Lee