Sintokogio, Ltd.

Mamoru Ito

Shoji Uchimura

A static-pressure bearing apparatus that prevents vibrations, the apparatus including an orifice and a vent groove, such that a laminar-flow status may be maintained in the entire region of the routes of the ventilated pressurized gas. A stage equipped with the static-pressure bearing apparatus is also provided. The configurations, such as the shapes of the orifice, vent groove, and the exhaust groove, of the static-pressure bearing apparatus, are designed such that a laminar flow may be maintained in the entire region of the routes for ventilation of the pressurized gas. The vent groovecomprises the circular grooveand a plurality of distributing grooves. The vent grooveis formed to be symmetrical about the centerline of the direction that the moving bodymoves. The circular grooveis formed as a circle to surround the orifice. The plurality of distributing groovesextend radially from the orificeto the circular groovesuch that the plurality of distributing groovesconnect the circular grooveand the orifice

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Toyokawa, Japan

Mamoru Ito