Canon Kabushiki Kaisha

Mamoru Iijima

Hiroshi Nakazato

Akihiro Nakamura

Horoshi Nakazato

A conveying system particularly suitably usable to convey a plate-like article such as a reticle or mask which is usable in transferring a microcircuit forming pattern onto a semiconductor wafer, is disclosed. The conveying system includes a first hand mechanism, a second hand mechanism and a reticle changing mechanism. The first hand mechanism is operable in the neighborhood of a reticle library to load and unload a reticle to and from a reticle cassette and also operable to convey a reticle between the library position and a first midway position. The second hand mechanism is operable to convey a reticle between a reticle setting position within an exposure apparatus and a second midway position. The reticle changing mechanism is operable to hold, at a time, a reticle supported at the first midway position by the first hand mechanism and a reticle supported at the second midway position by the second hand mechanism. Also, the reticle changing mechanism is operable to convey these reticles, at a time, so that their positions are interchanged. This arrangement allows conveyance of plural reticles between the library position and the reticle setting position in the exposure apparatus, while effecting sequential changing of the reticles. Further, the reticle library is made movable relatively to the first hand mechanism and in a direction along which the reticle cassettes are disposed in a layered fashion. This assures efficient utilization of the first hand mechanism, for plural reticle cassettes. Thus, the conveying system permits high-speed reticle changing.

Plate-like article conveying system

A dust-proof container for keeping therein a mask or reticle usable to transfer a pattern onto a semiconductor wafer for the manufacture of integrated circuits, is disclosed. The container includes a casing within which supporting pins for supporting the mask or reticle are formed. Also, in the casing, there are provided leaf springs for pressing the mask or reticle toward the supporting pins, and a releasing mechanism for releasing the reticle pressing force of the leaf springs. The releasing mechanism is responsive to a non-mechanical signal such as an electric signal to release the reticle pressing force. A shape memory alloy may be usable in the releasing mechanism. An opening/closing mechanism is provided to open/close a door which is operable to cover an opening formed in the casing for the insertion and extraction of the mask or reticle. A shape memory alloy may be used in the opening/closing mechanism. With the dust-proof container of the present invention, the necessity of use of a mechanical-signal transmitting system such as a linkage or otherwise in the casing is avoided. This effectively prevents creation of dust or foreign particles within the casing due to mechanical friction contact. Also, the possiblity of adhesion of dust or foreign particles to the mask or reticle contained in the container can be minimized.

Dust-proof container having improved construction for holding a reticle

A dust-tight container suitably usable in the manufacture of semiconductor microcircuits, for keeping therein a plate-like member such as a reticle, a photomask or a wafer is disclosed. The container has an elastomeric sealing member which is provided along an engaging portion between a container casing and a cover or door of the container, to achieve sufficiently complete dust-tight property of the container to thereby effectively prevent dust or foreign particles from entering into the container. At an engaging portion between the door and the container casing, a protrusion and a recess which mate at the time of closing of the door are provided. These mating protrusion and recess are formed at positions which are on the inner side of the elastomeric sealing member. This effectively prevents particles, adhered to the sealing member and scattering at the time of opening/closing of the door, from entering into the container.

Growing community of inventors

Yokohama, Japan

Mamoru Iijima