Smc Corporation

Mamoru Fukuda

Toyonobu Sakurai

Ikuo Kanzaka

Akira Enzaki

A cylindrical heat-generating member is disposed in a valve casing including a valve seat in a flow path connecting main ports, a valve member for opening and closing the valve seat, and a rod connecting the valve member and a piston. A first heater is mounted in the heat-generating member. The heat-generating member and a heat receiving member of the valve member are connected to each other by a heat-transfer member for expansion and contraction. As a result, the valve member is constantly heated through the heat-transfer member irrespective of its open/closed position. When the valve member is open, the heat receiving member comes in contact with the heat-generating member and the valve member is directly heated.

Poppet valve with heater

A poppet valve seal mechanism has a groove to which a seal member is mounted such that a width of an opening of the groove is smaller than a maximum width inside of the groove and a cross section area of the groove is smaller than that of the seal member. A maximum width of a portion of the seal member accommodated in the groove is greater than a width of the opening of the groove. A width of the opening is constant over its entire peripheral. An inner wall forming the inside of the groove is formed with communication holes and which bring the inside of the groove and the outside of the groove into communication with each other.

Poppet valve seal mechanism

A heater and a temperature sensor are mounted to a valve member driven for opening and closing through a piston and a rod, primary conductors extending from the heater and the temperature sensor are connected to a terminal block mounted to the piston, a secondary conductor having a spiral portion for expansion and contraction is connected between the terminal block and a connector mounted to a lid body, and displacements of the primary conductors due to opening and closing of the valve member are absorbed by expansion and contraction of the spiral portion.

Vacuum valve with heater

To allow the whole outer peripheral face of a casing of a poppet valve to be heated efficiently using an inexpensive rod-like heater. A heat transfer cover formed of heat transfer material is provided in a covering manner on an outer peripheral face of a valve casing comprising main ports , a flow path connecting these main ports , an annular valve seat provided in the flow path , a valve member of a poppet type opening/closing the valve seat and a rod coupled to the valve member so as to surround the whole periphery of the valve casing and a rod-like first heater is attached in a heater hole provided in the heat transfer cover

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Tsukuba-gun, Japan

Mamoru Fukuda