Mitsubishi Electric Corporation

Mamiko Yoshida

Yusuke Nakagawa

Yasutaka Inanaga

Noboru Wada

Gaku Oinuma

Takahisa Nagayama

In an ozone generating device including a discharge unit for discharging a material gas that flows through a discharge space formed between two electrodes to generate ozone and a cooling unit for radiating heat which is generated by the discharging, wherein the material gas is obtained by vaporizing a liquefied raw material, the cooling unit includes a first cooling unit through which a first refrigerant flows in contact with one of the two electrodes and a second cooling unit which is provided further to the downstream side of flow of the material gas in the discharge unit than the first cooling unit, and in which the cold heat source is the liquefied raw material and the temperature of the second refrigerant introduced to the second cooling unit is set to be lower than the temperature of the first refrigerant introduced to the first cooling unit.

Growing community of inventors

Chiyoda-ku, Japan

Mamiko Yoshida