Carl Zeiss Smt Gmbh

Mame Kouna Top-Diallo

Christoph Husemann

Holger Seitz

Thomas Thaler

Ute Buttgereit

Thomas Trautzsch

The invention relates to a method and an appliance for predicting the imaging result obtained with a mask when a lithography process is carried out, wherein the mask comprises mask structures to be imaged and the mask is destined to be illuminated in a lithography process in a projection exposure apparatus with a predetermined illumination setting for exposing a wafer comprising a photoresist. In accordance with one aspect of the invention, a method according to the invention comprises the following steps: measuring at least one intensity distribution obtained for the mask in the case of an illumination with illumination light in accordance with the illumination setting in a mask inspection apparatus using a sensor arrangement, ascertaining an electric field resulting from the interaction of the illumination light with the mask structures, both in respect of amplitude and in respect of phase, by way of this intensity measurement, and estimating an intensity distribution obtained in the photoresist when the lithography process is carried out on the basis of a mathematical simulation (forward calculation), in which the electric field ascertained is propagated in a layer system comprising at least the photoresist.

Growing community of inventors

Veldhoven, Netherlands

Mame Kouna Top-Diallo