Naeilhae, Co. Ltd.

Mal Eum Sung

Sang Jin Lee

Byung Mok Kim

Seong Jin Park

Jae Hyun Kim

Provided are an improved holographic reconstruction apparatus and method. A holographic reconstruction method includes: obtaining an object hologram of a measurement target object; extracting reference light information from the obtained object hologram; calculating a wavenumber vector constant of the extracted reference light information, and generating digital reference light by calculating a compensation term of the reference light information by using the calculated wavenumber vector constant; extracting curvature aberration information from the object hologram, and then generating digital curvature in which a curvature aberration is compensated for; calculating a compensated object hologram by multiplying the compensation term of the reference light information by the obtained object hologram; extracting phase information of the compensated object hologram; and reconstructing 3-dimensional (3D) shape information and quantitative thickness information of the measurement target object by calculating the quantitative thickness information of the measurement target object by using the extracted phase information of the compensated object hologram.

Holographic reconstruction apparatus and method

A method of generating three-dimensional (3D) shape information of an object to be measured from an image including intensity information of an object hologram generated by interference between a reference light reflected from an optical mirror and an object light affected by the object includes checking at least one frequency component included in the image and extracting real image components corresponding to a real image from the frequency component. The method also includes generating a correction light and a real image hologram based on the real image components, generating an intermediate hologram based on the correction light, and generating curvature aberration correction information from the intermediate hologram. The method further includes generating a correction hologram based on the curvature aberration correction information and generating the 3D shape information of the object from the correction hologram.

Method for generating three-dimensional shape information of object to be measured, defect detection method, and defect detection device

The present disclosure relates to improved holographic reconstruction device and a method. In one aspect, the present disclosure relates to improved holographic reconstruction device and method that can measure a digital hologram regardless of optical characteristics of an object to be measured, by an all-in-one type system integrating a transmissive system that measures an object transmitting light and a reflective system that measures an object reflecting light.

Holographic reconstruction device and method

Provided are on-axis and off-axis digital hologram generating device and method. The on-axis and off-axis digital hologram generating device includes an object phase generator configured to access a phase file of an object stored in a storage device and generate object phase information from the phase file of the object; a digital object light generator configured to generate digital object light information based on a light property of object light input by a user and the object phase information generated by the object phase generator; a digital reference light generator configured to generate digital reference light information based on a light property of reference light input by the user; and a digital hologram generator configured to generate a digital hologram based on hologram property information input by the user, the digital object light information generated by the digital object light generator, and the digital reference light information generated by the digital reference light generator.

On-axis and off-axis digital hologram generating device and method

Provided are an improved holographic reconstruction apparatus and method. A holographic reconstruction method includes: obtaining an object hologram of a measurement target object; generating a digital reference hologram calculated from the obtained object hologram; extracting each of a first phase information of the object hologram and a second phase information of the calculated digital reference hologram; calculating a phase information difference from the first phase information of the object hologram and the second phase information of the calculated digital reference hologram; and compensating for distorted phase information based on the calculated phase information difference, and calculating quantitative thickness information of the measurement target object by using the compensated distorted phase information to reconstruct 3-dimensional (3D) shape information and quantitative thickness information of the measurement target object.

A time delay error occurring in the case of acquiring two holograms (object hologram and reference hologram) necessary for reconstruction in the related art or in the case of acquiring four physical holograms having different phase shift degrees may be removed. DC noise (including background noise) may be completely removed by using a software-implemented phase shifting method.

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Seoul, South Korea

Mal Eum Sung