Samsung Electronics Co., Ltd.

Maksim Vladimirovich Riabko

Anton Sergeevich Medvedev

Sergey Nikolaevich Koptyaev

Alexey Andreevich Shchekin

Alexander Sergeevich Shorokhov

Kirill Igorevich Okhlopkov

Alexandr Igorevich Musorin

Sang-Min Lee

Alexey Dmitrievich Lantsov

Won-Don Joo

Akinori Okubo

Sang-Woo Bae

Aleksandr Shorokhov

Seong-Keun Cho

Eun-Hee Jeang

Provided is an apparatus for controlling a laser light propagation direction, including: a substrate configured to transmit at least a wavelength range of a laser light incident on the apparatus and deflected; and a metasurface disposed on the substrate, and comprising a plurality of nano-antennas, wherein each of the plurality of nano-antennas may include: a first contact and a second contact that are disposed apart from each other, and comprise an electrically conductive material to transmit at least the wavelength range of the laser light; and a semiconductor p-i-n heterostructure that disposed between the first contact and the second contact and comprises a p-region, an i-region and an n-region, which are disposed in parallel to the substrate.

Apparatus and method for controlling laser light propagation direction by using a plurality of nano-antennas

In a method of detecting a defect on a substrate, an incident beam may be radiated to a surface of the substrate to generate reflected light beams. A second harmonic generation (SHG) beam among the reflected light beams may be detected. The SHG beam may be generated by a defect on the substrate. A nano size defect may be detected by examining the SHG beam.

Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same

A biometrics authentication apparatus and a biometrics authentication method are disclosed. The biometrics authentication apparatus includes: a light source configured to emit a light; a modulator configured to change a spatial distribution of the light that is scattered and reflected from a region of interest of a user; a detector configured to detect an integral power of the light that is scattered from the region of interest; and a processor configured to obtain a measurement signal based on the integral power of the light, compare the measurement signal with a reference signal stored in a memory, and determine whether to authenticate the user based on a degree of match between the measurement signal and the reference signal.

Device and method for biometrics authentication

Provided is an optical measurement system. The optical measurement system includes: an optical module which includes an optical system and which is configured to illuminate a sample and register a defocused image of a nanostructured surface of the sample, an optical system parameter control module configured to set optical parameters of the optical system, an optical transfer function (OTF) measurement module configured to measure an OTF, a defocused image calculation module configured to calculate the defocused image based on the measured OTF and the optical parameters, and a critical dimension (CD) evaluation module configured to compare the registered defocused image with the calculated defocused image of the nanostructured surface of the sample and to output a CD value of the nanostructured surface.

Optical measurement system and method for measuring critical dimension of nanostructure

Growing community of inventors

Dolgoprudny, Russia

Maksim Vladimirovich Riabko