Canon Kabushiki Kaisha

Makoto Shibata

Masami Ikeda

Hiroto Matsuda

Hiroto Takahashi

Hirokazu Komuro

Shuji Koyama

Hisanori Tsuda

Toshio Suzuki

Manabu Sueoka

Takumi Suzuki

Hisashi Yamamoto

Yukio Kawajiri

Asao Saito

Masami Kasamoto

Teruo Ozaki

Junichi Kobayashi

Isao Kimura

Toshihiro Mori

Sakai Yokoyama

Kenji Hasegawa

Takashi Fujikawa

Keiichi Murakami

Haruhiko Terai

Ryoichi Koizumi

Hirokazu Komur

Junichi Kohayashi

Hitoshi Itoh

A method for manufacturing an ink jet recording head comprising a discharging orifice for discharging an ink, a discharge pressure generating element for generating energy for ink discharge, and an ink flow path communicating with the discharging orifice, said method comprising a step of preparing a first substrate provided with the discharge pressure generating element, a step of forming a removable pattern material for forming the ink flow path on the first substrate, a step of preparing a second substrate provided with an ink feed opening for feeding the ink to the ink flow papth, a step of fixing the first substrate and the second substrate with the interposition of a predetermined space via the pattern material, a step of injecting a resin for forming an ink flow path wall into a space between the first substrate and the second substrate, a step of curing the resin, a step of simultaneously cutting the first substrate, the second substrate and the cured resin to divide them into individual ink jet recording heads, and a step of removing the pattern material to form the ink flow path, wherein an injection opening is arranged in the vicinity of the portion for the ink flow path of the first substrate, and the resin is injected through the injection opening.

Method for manufacturing ink jet recording head

A substrate for a liquid jet recording head is provided at least with a supporting member, an exothermic resistive element arranged on the supporting member for generating thermal energy to be utilized for discharging recording liquid, and pairs of wiring electrodes connected to the exothermic resistive element at given intervals. Such a substrate comprises a layer formed with a film produced by the application of a bias ECR plasma CVD method. With the layer thus formed, a desirable configuration of the wiring stepping portions as well as a desirable film quality can be obtained so as to make the surface of the substrate smooth thereby to implement a liquid jet recording head having an excellent durability at a low manufacturing cost when such a substrate is used for the fabrication of the liquid jet recording head.

Methods for manufacturing a substrate for a liquid jet recording head,

A liquid jet recording head for discharging liquid droplets onto a recording medium includes a support, heat-generating resistance layer provided on the support for generating heat energy to discharge the liquid droplets, a pair of electrodes electrically connected to the heat-generating resistance layer, and heat-generating sections each serving as a portion for generating the heat energy, each head generating section comprising the heat-generating resistance layer sandwiched by the pair of electrodes. Plural discharge openings serve to discharge liquid droplets, a liquid chamber houses liquid, and there are plural liquid paths, each liquid path having an associated heat generating section, and communicating with an associated discharge opening and with the liquid chamber to supply liquid to the associated discharge opening from the liquid chamber. An layer on the support protects the heat-generating resistance layer and pair of electrodes, and the upper layer has an organic resin layer of organic material, and this organic resin layer is formed only on a whole region upstream of the heat-generating sections on the support in a liquid supply direction.

Liquid jet recording head

A film-forming apparatus is provided with a particle prevention means, whose structure prevents a drop in film-yield due to particle formation. The particle prevention means does not need to be cleaned as frequently as known particle prevention means, thus increasing film production efficiency. This particle prevention means has a tongued-and-grooved surface. When the particle prevention means having a tongued-and-grooved surface is set in the film-forming apparatus, the film-forming material is deposited in a discontinuous manner on the particle prevention means, which can extend the time of film exfoliation, and in turn, extend the cycle for cleaning the particle prevention means, and prevent a drop in film-yield due to the film exfoliation.

Film forming apparatus with particle prevention plate

An ink jet recording apparatus includes a recording head having plural discharge openings for discharging ink, a liquid chamber for storing the ink to be supplied to the discharge openings, a liquid flow path for communicating the discharge openings with the liquid chamber, and plural energy generating elements for generating energy to be used for discharging the ink from the discharge openings. The head also includes a substrate having the energy generating elements provided thereon and a transfer molded structural member made of thermosetting resin. The structural member has a concave portion for forming a liquid flow path, and the structural member is fused to the substrate.

Ink jet recording transfer molding processes for forming an ink jet

A head for an ink jet recording apparatus including: an electro-thermal transducer for generating thermal energy for use to discharge ink; and a circuit portion electrically connected to the electro-thermal transducer, wherein the circuit portion has a first conductive layer, an insulating layer disposed on the first conductive layer, and a second conductive layer disposed on the insulating layer, and an opening portion of the insulating layer is filled with a conductor formed by a selective deposition method so that the first conductive layer and the second conductive layer are connected to each other.

Method of fabricating head for recording apparatus

A substrate comprising a supporting member and a treated article provided on the supporting member comprising: 1) a patterned resistor layer; 2) a patterned material provided on the patterned resistor layer comprising at least aluminum; 3) a silicon compound film provided on both the patterned resistor layer and the patterned material; and 4) a multi-layered wiring provided on the article comprising as constituents at least a conductive layer comprising at least aluminum and electrically connected to the patterned material. The substrate includes substrates for integrated circuits, circuit boards, and ink jet recording heads. A method for etching a silicon compound film comprises etching the silicon compound film in a gas flow rate ratio of CHF.sub.3 to C.sub.2 F.sub.6 of 1 to 6 under an etching pressure of 40 to 120 Pa.

Substrate with an etched silicon compound film and an ink jet head

The present invention relates to an ink jet head manufacturing method including a pressurizing step for forming liquid passages communicating with discharge openings for discharging ink, by pressurizing to bond a base member and a top member together via wall members defining the liquid passages, except for areas where the liquid passages are formed. The present invention further provides an apparatus for carrying out such ink jet head manufacturing method.

Method and apparatus for manufacturing ink jet recording head

An ink jet recording head includes energy generators for generating the energy used to discharge ink and a substrate on which a circuit electrically connected to the energy generators is formed. Also provided is a protective member on an insulating layer on the substrate above the energy generators. The area of a protective member which is in contact with the ink is made to be as small as possible.

Ink jet recording head and apparatus having a protective member formed

An ink jet recording head which includes a substrate for ink jet recording head and a nozzle structural body provided with a plurality of nozzle-forming walls which is disposed over said substrate for ink jet recording head, said substrate for ink jet recording head comprising a base member, a heat generating resistor capable of generating, upon energization, thermal energy to be utilized for discharging ink, a pair of electrodes electrically connected to said heat generating resistor, a first protective layer, and a second protective layer wherein said heat generating resistor and said pair of electrodes are arranged on said base member, and said first protective layer and said second protective layer are disposed in this order over said heat generating resistor and said pair of electrodes, wherein a plurality of given portions of said second protective layer each situated at a position where said nozzle structural body is joined through one of said nozzle-forming walls to said substrate for ink jet recording head are recessed while leaving opposite stepped portions of said second protective layer situated above said pair of electrodes. A ink jet recording apparatus provided with said ink jet recording head.

Ink jet recording head, an ink jet recording apparatus provided with

Head for recording apparatus

A method for detecting an insulative condition of a protection layer of a substrate includes the steps of contacting an area of a surface of a protection layer to be detected with a liquid, and checking the electrical conduction between the liquid and a detection electrode which is electrically connected with an electrical element at an area on which the protection layer is not provided.

Method of testing substrate for liquid jet recording head

A liquid jet recording head comprises a substrate comprising a support, a resistive heater layer, electrodes electrically connected with the resistive heater layer, a portion of the resistive heater layer located between the electrodes being an electrothermal transducer, and an upper layer comprising a first protective layer comprising an inorganic insulating material, a second protective layer comprising an inorganic material, and a third protective layer comprising an organic material, wherein and the second protective layer and the third protective layer overlap each other in the vicinity of a portion where heat is generated by the electrothermal transducer and the overlapping width of the second protective layer and the third protective layer ranges from 10 .mu.m to 500 .mu.m. In another embodiment, the second protective layer extends along plural liquid flow paths for substantially less than the length thereof in a continuous strip that covers adjacent transducers.

An ink jet recording head comprises a substrate including a heat-generating resistance layer disposed on a support to provide a heat-generating section with two ends, a pair of electrodes on the support being connected electrically to the ends of the heat-generating sections. A member, joined to the substrate, has a recessed portion for forming a liquid pathway connected to an orifice for ejecting liquid. The member and substrate are joined so that the ends of the heat-generating section correspond to the liquid pathway. An organic material protective layer on the electrodes proximate to the ends of the heat-generating section is omitted from the heat-generating section and in the vicinity of an edge of the support where the liquid pathway is connected to the orifice. This configuration prevents the organic material protective layer from being subjected to the high temperatures attained by the heat-generating section and to the mechanical stresses encountered when the edge of the head is machined.

Liquid jet recording head having a support with an organic protective

A method for manufacture of an ink jet head comprises the process of forming a head main body by providing a positive resist layer to constitute ink passages for a substrate having ink ejection pressure generating means and then a ceiling member therewith; forming a carbon-contained film for the surface where the ink discharging ports of the head main body are formed; conducting a fluoric plasma treatment given to the carbon-contained film by utilizing a hydrofluoride compound; and removing the positive resist layer. With this method, an F-C coupled water repellent film is formed on the discharging port formation surface of an ink jet recording head evenly with a desirable bonding capability to enhance the reliability of water repellency.

Growing community of inventors

Yokohama, Japan

Makoto Shibata