Kawasaki Jukogyo Kabushiki Kaisha

Riken Institute of Physical and Chemical Research

Makoto Ryoji

Takeshi Yamada

Shigetomo Matsui

Yasuhiro Kumon

Hiroatsu Asari

Toshihiko Ishizuka

Shigemi Murakami

Toshio Atsuta

Takeshi Hasegawa

Shigeki Koe

Masahito Ban

Masakuni Tokai

Yukitaka Mori

Tamio Hara

Hiroyuki Matsumura

Shinji Koga

Manabu Hamagaki

Shozo Okazaki

Akitoshi Yamamoto

Masaki Uekado

Katsunobu Aoyagi

Yosuke Kajiyama

A plurality of extracting orifices,for extracting the electron beam from a discharge portion,into a plasma process chamber,via a compartment,are provided radially. A plurality of accelerating electrodes,are arranged in the process chamber,. The electron extracting direction from the extracting orifices,is set in substantially parallel with an object surface,. The number and the arrangement of the accelerating electrodes,are set such that a density distribution of the excited plasma has an oprimal state for processing the object. The object having a large area can be processed appropriately.

Plasma processing equipment

The present invention provides an electron-beam excited plasma generator which can effectively form samples of larger areas. The electron-beam excited plasma generator according to the present invention comprises a cathode (11) for emitting thermions; a discharge electrode (23) for gas discharge between the cathode and the same; an intermediate electrode (13) positioned coaxially with the discharge electrode in an axial direction; a discharge chamber (2) to be filled with discharge gas plasma generated by the gas discharge between the cathode and the discharge electrode; a plasma processing chamber (3) formed adjacent to the discharge chamber with a partition wall (21) disposed therebetween and positioned so that a surface-to-be-processed of a workpiece-to-be-processed (35) is positioned perpendicular to the axial direction; a plurality of orifices (22) for pulling out electrons in the discharge gas plasma in the discharge chamber into the plasma processing chamber, each being formed in the partition wall substantially perpendicular to the axial line and distributed radially with respect to the axial direction; and an accelerating electrode (31) disposed in the plasma processing chamber for pulling out and accelerating the electrons through the orifices.

Electron-beam excited plasma generator with side orifices in the

In an electron beam excited ion irradiation apparatus which irradiates ions to a material, an electrical discharge changes an inert gas into a plasma. Electrons are drawn from this plasma and are made into electron beams. The electron beams are passed through an active gas to create ion. When the ion is irradiated to a material, electron components of the electron beams, which are irradiated vertically to a surface of the material are changed their irradiation direction. Control of the range of electron beam irradiation is performed by a magnetic filed formed so as to surround the ion beams.

Electron beam excited ion irradiation apparatus

A composite structure is manufactured by joining a first material, preferably made of a magnetically permeable material and having a first joining surface in which a recess having an overhang surface is formed, to a second material, preferably made of an electrically conductive material and having a second joining surface to be joined to the first joining surface of the first material. On the second joining surface is integrally formed a protrusion having an outer configuration substantially corresponding to the inner shape of the recess. The first and second materials are firmly mechanically joined to each other by, for example, a casting method, a rolling method, a pressing method, or a method utilizing plastic flow of the second material.

Composite structures

A method of producing an anchor bonded composite plate. Anchor cavities are formed in a base plate by placing a forming plate with a circular hole therethrough over the base plate at a selected anchor cavity location. A punch placed through the circular hole then applies a punching force to the base plate, thereby forming in the base plate an annular mound with a concentrically punched hole. The mound is next pressed with a leveling plate to cause the material of the mound to flow inside the punched hole forming an anchor cavity with an overhanging internally tapered surface. A cladding plate with a plurality of anchor holes is then placed on the base plate with its holes aligned with the cavities of the base plate. An anchor pin is inserted in the thus aligned openings and is plastically deformed to mechanically bond the plates together. The cladding plate and the base plate may be made of an aluminum alloy and a hard steel, respectively. The composite plate thus produced is applicable as a reaction plate for a linear motor vehicle and as a tank material for a liquid natural gas holder.

Method of production of anchor-bonded composite structures

A composite structure is manufactured by joining a first material, preferably made of a magnetically permeable material having a first joining surface in which a recess having an overhang surface is formed, to a second material, preferably made of an electrically conductive material having a second joining surface to be joined to the first joining surface of the first material. On the second joining surface is integrally formed a protrusion having an outer configuration substantially corresponding to the inner shape of the recess. The first and second materials are firmly mechanically joined to each other by, for example, a casting method, a rolling method, a pressing method, or a method utilizing plastic flow of the second material.

Method of manufacturing composite structures

A composite bar structure is composed of at least outer and inner members extending parallelly in the longitudinal direction of the structure and joined mechanically at an interface therebetween in an interlocked. The structure is fabricated by forming a plurality of projections on the inner member over the entire interface, preparing the outer member in a tubular shape to readily encompass the inner member, relatively positioning the members to place the inner member within the outer member in telescoped state, and applying a constrictive compression force on the outer member so that it undergoes plastic deformation and reduction in diameter, whereby the projections bite into the inner surface of the outer member. The members are thus joined tightly to form the integral composite bar structure.

Composite bar structures of interlocked multiple members

Growing community of inventors

Kobe, Japan

Makoto Ryoji