Kabushiki Kaisha Toshiba

Toshiba Electronic Devices & Storage Corporation

Nippon Telegraph and Telephone Corporation

Toshiba Memory Corporation

Makoto Mizukami

Fumitaka Arai

Takashi Shinohe

Takeshi Kamigaichi

Hiroshi Kono

Johji Nishio

Riichiro Shirota

Ichiro Mizushima

Chiharu Ota

Takuma Suzuki

Tomohiro Iguchi

Kiyohito Nishihara

Masamu Kamaga

Yujiro Hara

Fumiki Aiso

Hirokazu Ishida

Shunsuke Asaba

Masaru Furukawa

Tatsuya Hirakawa

Nobuyoshi Izawa

Hiroshi Watanabe

Yoshio Ozawa

Hideyuki Funaki

Atsushi Fukumoto

Takashi Suzuki

Kiyotaka Miyano

Takashi Izumida

Nobutoshi Aoki

Tadashi Iguchi

Masaki Kondo

Kazuto Takao

Masahiro Ueno

Takeshi Murata

Teruyuki Ohashi

Yukio Nakabayashi

Toshiyuki Enda

Hiroyoshi Tanimoto

Katsuhisa Tanaka

Daigo Ichinose

Shigeru Kinoshita

Shigeyuki Takagi

Naoki Kusunoki

Hiroyuki Irifune

Kikuji Katoh

Shuji Kamata

Koji Otani

Yasunaga Mitsuya

Shuichi Takanami

Ryoichi Arai

Masao Sakai

Yoshihiro Isomura

Akio Mitamura

Tetsuo Mikazuki

Kikuji Katou

Shigetaro Iwatsu

Yoshihiro Sako

Yuji Kusumoto

Masanori Nagata

The super junction structure part includes a plurality of n-type pillars having higher impurity concentrations than the second layer, a plurality of p-type pillars having higher impurity concentrations than the second layer, and a boundary region positioned between the n-type pillar and the p-type pillar in a second direction orthogonal to the first direction, the boundary region extending in the first direction continuously from the second layer, the boundary region having a lower impurity concentration than the n-type pillars and the p-type pillars.

Semiconductor device

A semiconductor device of embodiments includes: a first silicon carbide region of first conductive type including a first region in contact with a first face of a silicon carbide layer having first and second faces; a second silicon carbide region of second conductive type above the first silicon carbide region; a third silicon carbide region of second conductive type above the second silicon carbide region; a fourth silicon carbide region of first conductive type above the second silicon carbide region; a first gate electrode and a second gate electrode extending in the first direction; a first electrode on the first face and including a first portion and a second portion between the first and the second gate electrode. The first portion contacts the third and the fourth silicon carbide region. The second portion provided in the first direction of the first portion and contacts with the first region.

A semiconductor device includes first, second, and third metal layers on a surface of the insulating substrate. A first terminal is connected to the first metal layer at a first region. A second terminal is connected to the second metal layer at a second region. An output terminal is connected to the third metal layer. First chips are aligned along a first direction on the first metal layer. Second chips are aligned along the first direction on the third metal layer. A first wire connects a first upper electrode of a first chip to the third metal layer. A second wire connects a second upper electrode of a second chip to the second metal layer. The second chips are between the first chips and the third metal layer in a second direction perpendicular to the first direction. Available conductive routes between the first and second terminals are made more uniform.

A semiconductor device includes a first silicon carbide region of a first conductivity type, a second silicon carbide region of a second conductivity type on the first region, and a third silicon carbide region of a second conductivity type on the second region. Fourth and fifth silicon carbide region of the first conductivity type are on the third region. A first electrode has a first portion between the fourth region and fifth region in a first direction. A metal silicide layer is between the first portion and the third region, between the first portion and the fourth region in the first direction, and between the first portion and the fifth silicon carbide region in the first direction.

Semiconductor device and method of manufacturing semiconductor device

A semiconductor device according to an embodiment includes a semiconductor layer, a metal layer, and a bonding layer provided between the semiconductor layer and the metal layer, the bonding layer including a plurality of silver particles, and the bonding layer including a region containing gold existing between the plurality of silver particles.

A semiconductor device includes a first electrode, a second electrode, a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type; a third semiconductor layer of the first conductivity type; a first active region; and a third electrode. The first semiconductor layer is located between the first electrode and the second electrode. The second semiconductor layer is located above the first semiconductor layer. The first active region is next to the second semiconductor layer in a second direction. The first active region includes a first upper portion and a first upper portion. An average value of a width in the second direction of the first lower portion is greater than an average value of a width in the second direction of the first upper portion. The third semiconductor layer is electrically connected with the second electrode.

A semiconductor device according to an embodiment includes a silicon carbide layer having first and second planes; first and second trenches extending in a first direction; first and second gate electrodes; a first silicon carbide region of a first conductivity type; a plurality of second silicon carbide regions of a second conductivity type between the first silicon carbide region and the first plane, located between the first trench and the second trench, and separated from each other in the first direction; a fourth silicon carbide region of the second conductivity type between two of the second silicon carbide regions and contacting the second silicon carbide region; a fifth silicon carbide region of the second conductivity type between the two second silicon carbide regions and contacting the second silicon carbide region; a first electrode contacting the first silicon carbide region; and a second electrode.

A stacked multilayer structure according to an embodiment of the present invention comprises: a stacked layer part including a plurality of conducting layers and a plurality of insulating layers, said plurality of insulating layers being stacked alternately with each layer of said plurality of conducting layers, one of said plurality of insulating layers being a topmost layer among said plurality of conducting layers and said plurality of insulating layers; and a plurality of contacts, each contact of said plurality of contacts being formed from said topmost layer and each contact of said plurality of contacts being in contact with a respective conducting layer of said plurality of conducting layers, a side surface of each of said plurality of contacts being insulated from said plurality of conducting layers via an insulating film.

Manufacturing method of stacked multilayer structure

A semiconductor device according to an embodiment includes a silicon carbide layer having first and second planes; a first silicon carbide region; second and third silicon carbide regions between the first silicon carbide region and the first plane; a fourth silicon carbide region between the second silicon carbide region and the first plane; a first and second gate electrodes; a suicide layer on the fourth silicon carbide region; a first electrode on the first plane having a first portion and a second portion, the first portion being in contact with the first silicon carbide region, the second portion being in contact with the suicide layer; a second electrode on the second plane; and an insulating layer between the first portion and the second portion having a first side surface and a second side surface, an angle of the first side surface being smaller than that of the second side surface.

Stacked multilayer structure and manufacturing method thereof

According to an embodiment, a semiconductor device includes a first electrode, a second electrode, a first semiconductor region, a plurality of second semiconductor regions, a plurality of third semiconductor regions, a plurality of third electrodes, and a plurality of gate electrodes. The gate electrodes and the third electrodes are arranged parallel in a second direction and periodically with a third arrangement cycle such that the ratio of the number of the gate electrodes and the third electrodes in the first region is m3 to m4 (m3, m4 being positive integers and m3 being more than or equal to m4).

The invention provides an ultra-low-on-resistance, excellent-reliability semiconductor device that can finely be processed using SiC and a semiconductor device producing method. A semiconductor device includes: a silicon carbide substrate; a first-conductive-type first silicon carbide layer provided on a first principal surface of the silicon carbide substrate; a second-conductive-type first silicon carbide region formed at a surface of the first silicon carbide layer; a first-conductive-type second silicon carbide region formed at a surface of the first silicon carbide region; a second-conductive-type third silicon carbide region formed below the second silicon carbide region; a trench piercing through the second silicon carbide region to reach the third silicon carbide region; a gate insulating film; a gate electrode; an interlayer insulating film with which the gate electrode is covered; a first electrode that is formed on the second silicon carbide region and the interlayer insulating film in a side surface of the trench while containing a metallic element selected from a group consisting of Ni, Ti, Ta, Mo, and W; a second electrode that is formed on the third silicon carbide region in a bottom portion of the trench and the first electrode while containing Al; a first main electrode formed on the second electrode; and a second main electrode formed on a second principal surface of the silicon carbide substrate.

Semiconductor device and semiconductor device manufacturing method

Growing community of inventors

Kawasaki, Japan

Makoto Mizukami