Toa Nenryo Kogyo Kabushiki Kaisha

Canon Kabushiki Kaisha

Tonen Corporation

Toa Nenryo Kogyo, K. K.

Makoto Miyazaki

Hiroshi Inoue

Junji Isohata

Kunitaka Ozawa

Hironori Yamamoto

Hideki Yoshinari

Koichi Matsushita

Makoto Yoda

Masami Kizaki

Masahito Fujita

Naomi Inaba

Satoshi Ueki

Chihiro Imai

Shinkichi Murakami

Masaaki Isoi

Takeshi Nomura

Sadahisa Wada

Takehiko Suzuki

Nobushige Korenaga

Hirohito Ito

Osamu Watanabe

Masato Sakuma

Yukio Nagashima

Mamoru Tachikawa

Yoshiharu Doi

Minoru Yomoda

Kazuo Soga

Makoto Saito

Yoshio Wakoh

Osamu Watanebe

Yuichi Shimbori

Hiroshi Toki

An imprint apparatus is disclosed that forms, by pressing a resin applied onto a substrate and a mold against each other, a pattern on the substrate. The imprint apparatus includes a substrate stage that holds the substrate, and a control unit for controlling the position of the stage by outputting a manipulating variable on the basis of a position error between a position of the stage which has been measured by position measurement unit and a target position. The control unit reduces a ratio of the manipulating variable to the position error while the substrate and the mold are in contact with each other until mold release.

Imprint apparatus and method for producing article

A novel sulfone compound represented by the general formula (I) or (II) is disclosed. A sizing liquid containing the sulfone compound is applied to reinforcing fibers for improving compatibility thereof to a matrix resin into which the fibers are to be incorporated to form a fiber-reinforced composite material.

Process for sizing reinforcing fiber by applying sulfone compounds

A two component-type curing agent composition is disclosed which comprises a first curing agent which is capable of cross-linking an epoxy resin and which is at least one member selected from primary amines, phenolic compounds and acid anhydrides, and a second curing agent which is at least one compounds represented by the following general formula: ##STR1## wherein X is --CR.sub.1 R.sub.2 --, --CO--, --COO--, --SO.sub.2 --, --SO--, --S--, --O--, --NR.sub.1 --, --SiR.sub.1 R.sub.2 -- or --POR.sub.1 -- where R.sub.1 and R.sub.2 each stands for hydrogen, a lower alkyl or a phenyl; Y and Y' each stands for hydrogen, a lower alkyl or an electron attracting group; R is a lower alkyl; and m and n each is an integer of 1-4.

Epoxy resin curing agent based on blends containing disecondary aromatic

An improved process for polymerizing butene-1 in the presence of a polymerization catalyst composed of (a) a catalyst component containing titanium and halogen as essential constituents and (b) an organometallic compound, wherein the improvement comprises bringing said catalyst component into contact with an activity inhibitor when said catalyst component is activated or after said catalyst component has been activated with said organometallic compound, and subsequently polymerizing butene-1.

Process for polymerization of butene-1

An apparatus for photolithographically transferring, onto a plate-like member a pattern corresponding to picture elements of a liquid crystal display device and a pattern corresponding to driving circuits and so on, by use of a photomask. The surface of the plate-like member is divided into different areas and, each time one of the different areas of the plate-like member is subjected to the pattern transfer operation, the plate-like member is fed stepwise relative to an optical system provided to project an image of the photomask onto the plate-like member. At the same time, the range of the photomask pattern which is to be transferred onto the plate-like member is changed. By this, a portion of the picture-element pattern and a portion of the circuit pattern are transferred onto each of the different areas on the plate-like member, whereby a large-size pattern contributable to form a large-size display picture plane and a pattern contributable to form a control circuit for controlling the picture plane are transferred on the plate-like member.

Exposure apparatus

A new thermocurable composition is disclosed which comprises a Bisphenol A-type epoxy resin having a number average molecular weight of 650-1300, 10-40% by weight of the Bisphenol A-type epoxy resin having an epoxy equivalent of 180-195; and a curing agent capable of cross-linking the epoxy resin. The curing agent is preferably a compound represented by the following general formula: ##STR1## wherein X is --CR.sub.1 R.sub.2 --, --CO--, --COO--, --SO.sub.2 --, --SO--, --S--, --O--, --NR.sub.1 --, --SiR.sub.1 R.sub.2 -- or --POR.sub.1 -- where R.sub.1 and R.sub.2 each stands for hydrogen, a lower alkyl or a phenyl; Y and Y' each stands for hydrogen, a lower alkyl or an electron attractive group; R is a lower alkyl; and m and n each is an integer of 1-4, or a mixture thereof with a primary amine, a phenolic compound or an acid anhydride.

Bisphenol A epoxy resin mixtures with aromatic di-secondary amine

A sizing agent for a carbon fiber comprized mainly of an unsaturated urethane compound produced by a reaction of an unsaturated alcohol with an isocyanate which is able to couple the carbon fiber with an unsaturated polyester resin or vinylester resin is disclosed. The preferably unsaturated alcohols are allylalcohols and reaction products of an unsaturated carboxylic acids with an alkyleneoxides.

Sizing agent for carbon fibers

An exposure apparatus for exposing in a step-and-scan manner a plate-like member to a pattern with radiation so that images of the pattern are transferred onto different regions on the plate-like member. The apparatus includes a mirror imaging optical system for projecting the image of the pattern onto the plate-like member, a carriage for scanningly moving, at the time of exposure, the plate-like member relative to the mirror imaging system, and a stage movably mounted on the carriage for step-feeding the plate-like member at the time of non-exposure so as to sequentially place the different regions of the plate-like member at an exposure station under the mirror imaging system. A locking system is provided to lock the stage relative to the carriage by use of vacuum, at the time of exposure, whereby unwanted displacement of the plate-like member relative to the carriage at the time of scanning exposure is prevented. Also, any positional deviation which may be caused by the locking of the stage is compensated for, by controlling supply of air pressure to linear air-bearings supporting the carriage.

An exposure apparatus for exposing in a step-and-scan manner a plate-like member to a pattern with radiation so that images of the pattern are transferred onto different regions on the plate-like member. The exposure apparatus includes a mirror imaging optical system for projecting the image of the pattern onto the plate-like member. Also, the exposure apparatus includes a carriage for scanningly moving, at the time of exposure, the plate-like member relative to the mirror imaging optical system and a stage for step-feeding the plate-like member at the time of non-exposure so as to sequentially place the different regions of the plate-like member at an exposure station under the mirror imaging system. The stage is mounted on the carriage, and the movement of the carriage is guided by linear air-bearings. The apparatus is arranged such that inclination of the carriage relative to the mirror imaging system to be caused by the movement of the stage is corrected by controlling the amount of air supply to the linear air-bearings, whereby occurrence of shift between the images to be transferred onto the plate-like member is prevented regardless of the change in position of the stage relative to the carriage. In another aspect, the amount of movement of the stage is corrected in accordance the amount of image shift which otherwise may be caused, whereby occurrence of such image shift is prevented.

A process for producing a propylene polymer having a carbonyl group at the terminal, said process comprising polymerizing propylene to give a living propylene polymer in the presence of a catalyst composed of beta-diketone vanadium chelate and an aluminum compound represented by the formula R.sub.2 AlX (wherein R is a hydrocarbon group having 1 to 8 carbon atoms and X is a halogen atom), and reacting the living propylene polymer with a carbonylating agent.

Process for producing propylene polymer

A process for homopolymerizing an olefin or copolymerizing an olefin with another olefin in the presence of a catalyst composed of

Process for polymerization of olefins

A step-and-repeat type exposure apparatus for photoprinting patterns on different portions of a workpiece, for the manufacture of a large-size pattern to be used in a panel display device, for example. Plural masks having respective patterns are used and, each time the pattern of one of the masks is transferred onto corresponding one of the portions of the workpiece, the workpiece is displaced while, on the other hand, the used mask is replaced by a subsequent mask. For the exposure of a first one of the portions of the workpiece, the first portion is aligned with a corresponding first mask, set at a reference position, by use of alignment marks provided on the first portion and the first mask. In regard to the exposure of a second one of the portions of the workpiece, the workpiece is moved while monitoring the position thereof by use of a laser interferometer, so that the second portion is brought into alignment with a second mask placed at the reference position.

Modified polymer compositions comprising elastomers blended with not more than 50 parts by weight of a crystalline polyolefin are prepared by reaction of the polymers with an unsaturated carboxylic acid or its acid anhydride. The modified composition optionally containing a filler, is particularly suitable for laminating to metals and other polymers; laminates show superior hot water resistance, salt water resistance and thermal shock resistance.

Modified elastomer and laminate thereof

A catalyst component for polymerization of olefins which is prepared by contacting a product obtained by contacting (A) a magnesium alkoxide, (B) a silicon compound having the hydrogen-silicon bond, and (C) a titanium compound with one another, with (D) (a) a hydrocarbon, (b) a halogenated hydrocarbon, and/or (c) a halide of an element selected from the elements of Groups IIIa, IVa, and Va of the Periodic Table.

Growing community of inventors

Saitama, Japan

Makoto Miyazaki