Japan Science and Technology Agency

Mitsubishi Denki Kabushiki Kaisha

Japan Science and Technology Corporation

Makoto Mita

Hiroyuki Fujita

Dai Kobayashi

Shouichi Tensaka

Hiroshi Toshiyoshi

Nobuaki Konno

Masahiro Tsugai

Yoshio Mita

Philippe Helin

An extremely small, self-moved, impact driven microactuator is disclosed that has a movable mass member electrostatically driven and which eliminates the need for it to be assembled individually. The microactuator includes a fixing member () securely connected to a pedestal part (), an elastic support beam member () having one end securely connected to the fixing member, a movable mass member () fastened to the other end of the elastic support beam member, a driving electrode and a stopper member () each securely connected to the pedestal part and spacedly juxtaposed with the movable mass member, and a power supply circuit () for applying a voltage between the movable mass and driving electrode members. In operation, turning the power supply circuit ON generates electrostatic attraction between the driving electrode member and movable mass members, thereby bringing the movable member into collision with the stopper member, followed by the transmission of a kinetic energy then produced to the outer frame part, and subsequently turning the power supply circuit OFF removes the electrostatic attraction, thereby permitting the movable mass member to return to its original position under an elastic force exerted by the elastic support beam member, followed by the transmission of a reaction force then produced to outer frame part, whereby the microactuator is bodily moved in a given direction.

Micro-actuator and method making the same

An extremely small, self-moved, impact driven microactuator is disclosed that has a movable mass member electrostatically driven and which eliminates the need for it to be assembled individually. The microactuator includes a fixing member ( ) securely connected to a pedestal part ( ), an elastic support beam member ( ) having one end securely connected to the fixing member, a movable mass member ( ) fastened to the other end of the elastic support beam member, a driving electrode and a stopper member ( ) each securely connected to the pedestal part and spacedly juxtaposed with the movable mass member, and a power supply circuit ( ) for applying a voltage between the movable mass and driving electrode members. In operation, turning the power supply circuit ON generates electrostatic attraction between the driving electrode member and movable mass members, thereby bringing the movable member into collision with the stopper member, followed by the transmission of a kinetic energy then produced to the outer frame part, and subsequently turning the power supply circuit OFF removes the electrostatic attraction, thereby permitting the movable mass member to return to its original position under an elastic force exerted by the elastic support beam member, followed by the transmission of a reaction force then produced to outer frame part, whereby the microactuator is bodily moved in a given direction.

Electrostatic impact driving microactuator

A mechanical optic switch is disclosed that is of high mirror quality, high in the accuracy of opto-axial alignment between a mirror and a fiber aligning structure and yet of low insertion loss, permitting fiber optic switching by an electromagnetic force. It is made by a crystallographically oriented face dependent etching process, which simultaneously forms in a Si (100) crystallographically faced single crystal substrate ( ), V-grooves ( ) for fixing optical fibers ( ) with the V-groove's longitudinal axes oriented in the <110> crystallographic direction or in a direction equivalent thereto; and a resilient support beam ( ) and a mirror ( ) with the longitudinal axis of the resilient support beam and the mirror surface of the mirror oriented in the <100> direction or in a direction equivalent thereto. Slitting into the substrate from a rear surface thereof by etching renders the support beam resilient and flexible.

Mechanical optical switch and method for manufacturing the same

A micro-mirror device includes a mirror forming substrate on which a mirror is disposed. A pair of torsion beams are disposed on opposing sides of the mirror forming substrate. An anchor projects from a supporting substrate, supporting the ends of the torsion beams. A driving frame surrounds at least one side of the torsion beams and is connected to the mirror forming substrate through a link beam. A drive force generator drives the driving frame.

Micro-mirror device

Growing community of inventors

Tokyo, Japan

Makoto Mita