Mitsui Toatsu Chemicals, Incorporated

Other

Makoto Aritsuka

Isao Harada

Naruyuki Iwanaga

Sadaichi Komohara

Atsuhisa Mimoto

There is provided with a method of treating an exhaust gas comprising the steps of loading into a column an exhaust gas treating agent containing as a main component a metal of which surface is fluorinated previously; passing through the column the exhaust gas containing nitrogen trifluoride as a component to be treated; and contacting the exhaust gas with the exhaust gas treating agent. And the exhaust gas treating agent is also provided.

Exhaust gas treating agent and a method of treating exhaust gas using

A process is provided by the present invention for the preparation of a partially-substituted fluorosilane represented by the following formula: SiH.sub.n F.sub.4-n wherein n stands for an integer of 1 to 3. The process comprises converting a corresponding partially-substituted chlorosilane represented by the following formula: SiH.sub.n Cl.sub.4-n wherein n has the same meaning as defined above into the partially-substituted fluorosilane by halogen replacement while using a fluorinating agent. The fluorinating agent is zinc fluoride having a water content not higher than 0.2 wt. %. Preferably, the size of crystallites in the direction of a (110) plane of the zinc fluoride is at least 500 .ANG..

Process for the preparation of partially-substituted fluorosilane

There is here disclosed a method for removing nitrous oxide (N.sub.2 O), carbon dioxide (CO.sub.2) and dinitrogen difluoride (N.sub.2 F.sub.2) from a nitrogen trifluoride gas. The present invention is directed to a method for purifying a nitrogen trifluoride gas which comprises the steps of thermally treating, at a temperature of 250.degree. to 700.degree. C., a zeolite selected from the group consisting of analcime, clinoptilolite, mordenite, ferrierite, phillipsite, chabazite, erionite and laumotite; forming a packed bed of the treated zeolite; and passing the nitrogen trifluoride gas containing the gaseous impurities at a temperature of -125.degree. to 50.degree. C. through the filler layer.

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Yamaguchi, Japan

Makoto Aritsuka