Nsk Corporation

Ulvac, Inc.

Yokohama National University

Makoto Arai

Kazuo Suzuki

Satoru Takasawa

Toshiya Aoyagi

Koki Kora

A cathode unit includes first and second magnet units that are driven to rotate around an axis on a side opposed to a sputtering surface of a target. The first magnet unit is configured to cause a first leakage magnetic field to act on a space in front of the sputtering surface including a target center inward. The second magnet unit is configured to cause a second leakage magnetic field to act locally in the space in front of the sputtered surface located between the target center and the outer edge of the target and to enable self-holding discharge under low pressure of plasma confined by the second leakage magnetic field.

Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus

A tank () of a ship () is provided with an inflow port () and an outflow port () opening through a bottom of the ship (). The inflow and outflow ports are spaced apart from each other in a headway direction of the hull. The ports are equipped with closure means (), which closes the ports so as to ensure hull buoyancy by means of air in the tank. The ports allow seawater outside the ship to flow into the tank through the inflow port and the seawater in the tank to flow out of the ship through the outflow port, with use of headway motion of the ship. A partition () provides a weir extending in a widthwise direction of the hull in the tank, and divides a region in the tank into an inflow area () and an outflow area (). The tank, partition, inflow port, outflow port and closure means constitute a ship buoyancy control system.

Ship buoyancy control system

In a non-destructive inspection device of the present invention which detects in a non-destructive manner a defect of a member to be inspected, based on a change in magnetic fluxes due to eddy currents that are generated by an inspection probe having a coil, a driving section which adjusts a position of the inspection probe, and measuring device for, based on a detection signal of the inspection probe, measuring a lift-off between the inspection probe and the member to be inspected are disposed. The driving section is controlled in accordance with a result of measurement of the measuring device, whereby a control of making the lift-off constant is performed.

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Kanagawa, Japan

Makoto Arai