Canon Kabushiki Kaisha

Maki Hatta

Kazuhiro Asai

Takumi Suzuki

Tamaki Sato

Masahiko Kubota

Ryoji Kanri

Shoji Shiba

Hiroe Ishikura

Akihiko Okano

Etsuko Hino

Naozumi Nabeshima

Toru Yamane

Takayuki Ono

Norio Ohkuma

Masaki Ohsumi

Hikaru Ueda

A liquid discharge head includes a substrate having an energy generating element configured to generate energy required to discharge liquid, a discharge port configured to discharge the liquid and provided in an opposed relationship to the energy generating element, a wall member defining a chamber adapted to store the energy required to discharge liquid the energy being generated by the energy generating element, a discharge portion defining a fluid path connecting the chamber and the discharge port, a supply path facilitating supplying the liquid into the chamber, and a pair of hollow portions provided in the wall member, wherein the hollow portions oppose each other and sandwich at least the entire discharge port in a direction from the discharge port to the substrate, and the hollow portions are independent of the chamber.

Liquid discharge head and manufacturing method of the same

A method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port. A material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic acid and methacrylate ester.

Liquid discharge head manufacturing method, and liquid discharge head obtained using this method

A method for manufacturing a minute structure comprises a step of forming an ionizing radiation decomposing type positive type resist layer including a methyl isopropenyl ketone as a first positive type photosensitive material layer, a step of forming an ionizing radiation decomposing type positive type resist layer including a photosensitive material of a copolymer as a second positive type photosensitive material layer to be sensitized by an ionizing radiation of a second wavelength range on the first positive type photosensitive material layer, a step of forming a desired pattern in the above-mentioned second positive type photosensitive material layer, and development using a developing solution, and then, a step of forming a desired pattern in the above-mentioned first positive type photosensitive material layer to form a convex shape pattern.

Method for manufacturing minute structure, method for manufacturing liquid discharge head, and liquid discharge head

A method for manufacturing a liquid discharge head including an energy generating element for generating energy used to discharge a liquid, a discharge opening for discharging the liquid, and a channel for supplying the liquid to the discharge opening is provided. The method includes a step of forming a lamination on a substrate provided with the energy generating element, such that the lamination includes a plurality of laminated negative photosensitive resin layers with a light shielding film pattern for forming the channel, the light shielding film pattern being disposed therebetween, a step of exposing a portion which is set to be a member consisting the channel of the negative photosensitive resin layers in the lamination; and a step of removing an unexposed portion of the negative photosensitive resin layers in the lamination.

Method for manufacturing liquid discharge head, liquid discharge head, and liquid discharge recording apparatus

A method for manufacturing a liquid discharge head includes the steps of depositing a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid, forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer, forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer formed on the solid layer, and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic anhydride and methacrylate ester.

Liquid discharge head having hollow portions for relaxing stress in the head and manufacturing method of the same

A cationic photopolymerizable epoxy resin composition includes an epoxy resin, a cationic photopolymerization initiator, an inhibitor of cationic polymerization and a compound that has a fluoroalkyl group and also has a substituent at its terminal, with the substituent being allowed to cross-link react with the epoxy group of the epoxy resin. The cationic photopolymerizable epoxy resin composition further includes a thermal cationic polymerization catalyst.

Cationic photopolymerizable epoxy resin composition, minute structural member using the same and method for manufacturing minute structural member

A method for forming an ink jet recording head includes at least a step of forming an ink flow path pattern on a substrate by a photodecomposable positive type resist resin, a step of, once executing each of the steps of applying, exposing and baking thereon a nozzle-constituting resin layer which is a negative type resist containing an optical cation polymerization starting agent and having an epoxy resin as a chief component with respect to each of an ink flow path pattern and an ink discharge port pattern, collectively developing unexposed portions on the respective nozzle-constituting resin layers, and a step of removing the formed photodecomposable resin is minimized.

Method of manufacturing a liquid discharging head

The present invention has as its object to provide a pattern forming method which, even if a pattern is formed by photolithography, can keep the edge of the opening portion of the pattern in a sharp state and yet, can make the wall surface of the recess of the pattern into a tapered shape, and a method of manufacturing an ink jet recording head to which the aforedescribed method is applied. The pattern forming method is a pattern forming method having the step of forming on a substrate a coat resin layer containing a photopolymerizable resin, the step of applying a solution containing a photopolymerization starting agent onto the coat resin layer, and forming the distribution of the density of the photopolymerization starting agent in the direction of film thickness of the coat resin layer, and the step of applying light from above the coat resin layer through a mask having a pattern depicted thereon, and the step of developing the coat resin layer to which the light has been applied to thereby make it into a coat resin layer having the pattern, and this method is applied to the manufacture of an ink jet recording head.

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Tokyo, Japan

Maki Hatta