Basf Se Corporation

Maike Bergeler

Volodymyr Boyko

Szilard Csihony

Daniel Loeffler

Lothar Engelbrecht

Yeni Burk

Frank Pirrung

Marcel Brill

Patrick Wilke

The invention relates to the use of a composition comprising a Cto Calkanol and a carboxylic acid ester of formula (I) wherein Ris selected from a Cto Calkyl, which may be unsubstituted or substituted by OH or F, and —X—[O—X]—H; Ris selected from a Cto Calkyl, which may be unsubstituted or substituted by OH or F, and —X—[O—X]—H; X, Xare independently selected from Cto Calkandiyl, which may be unsubstituted or substituted by OH or F; n is an integer from 1 to 5. wherein, the Cto Calkanol and the carboxylic acid ester are selected so as to form an azeotropic mixture and are present in an amount from 20% by weight below to 20% by weight above such azeotropic mixture.

Use of compositions comprising a solvent mixture for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below

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Ludwigshafen, Germany

Maike Bergeler