Von Ardenne Asset Gmbh &co. Kg

Maik Vieluf

Ekkehart Reinhold

Lars Ullmann

The invention relates to various embodiments of a solid particle-source () that can comprise: a container () which comprises an area for receiving solid particles; at least one electron source () for introducing electrons into the solid particles such that an electrostatic charge of the solid particles produced by the electrons separates them from each other and accelerates them in a direction out from the container (); a vibration source () which is designed to introduce a vibration in the region in order to loosen the solid particles, the electronic source comprising an emission surface for emitting electrons into a vacuum emission region.

Solid particle source, treatment system and method

Herein is disclosed a process comprising transporting of a foil structure in a coating region in a vacuum chamber, wherein the foil structure has a thickness of less than 40 &#x3bc;m; and coating the foil structure with a protective layer using a gaseous coating material; wherein the gaseous coating material comprises a metal; applying an active material on the foil structure to form a first electrode which has a first chemical potential; assembling the first electrode with a second electrode, where the second electrode has a second chemical potential; and encapsulating the first electrode and the second electrode.

Method and coating arrangement

According to the present disclosure, a process includes transporting of a foil structure in a coating region in a vacuum chamber, wherein the foil structure has a thickness of less than 40 &#x3bc;m; and coating the foil structure by physical vapor deposition, which includes forming a gaseous coating material in the coating region; wherein the gaseous coating material includes carbon, such that a protective layer is formed that includes a carbon microstructure covering more than about 50% of the foil structure and having a fraction of pores or voids less than about 50%.

The disclosure relates to a method for coating a substrate with particles, wherein the following method steps are carried out in a vacuum: positioning a substrate surface of the substrate to be coated in a vacuum and in the direction of a region in which there are disposed solid particles with which the substrate surface is to be coated; and; and introducing electrons into the solid particles for electrostatic charging of the solid particles in such a way that a force brought about by the electrostatic charging separates the solid particles from one another and accelerates them in the direction of the substrate surface of the substrate for coating of the substrate surface with at least a portion of the separated solid particles. A device that can be used in accordance with the disclosure has a particle container, a substrate holder and an electron source.

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Moritzburg, Germany

Maik Vieluf