Micro-epsilon Messtechnik Gmbh & Co. Kg

Maik Richter

Johann Hinken

Christian Ziep

The present invention relates to a measuring device for determining the thickness of a dielectric layer on a conductive substrate. The device comprises a resonance cavity for electromagnetic fields which has a rotationally symmetrical wall, an end plate and an open end and is adapted to be positioned with the open end on the dielectric layer. The device further comprises an antenna which is adapted to excite an electro-magnetic field in the resonance cavity, a reflection measuring unit for determining at least one property of the electromagnetic field and an evaluation circuit for determining the thickness of the dielectric layer from the at least one property of the electromagnetic field. A diameter of the rotationally symmetrical wall varies in a longitudinal direction of the resonance cavity.

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Magdeburg, Germany

Maik Richter