Hitachi High-tech Corporation

Mai Yoshihara

Hiroyuki Chiba

Yuusuke Oominami

Wei Chean Tan

Keisuke Igarashi

Hirotsugu Kajiyama

A technique that enables automatic focus adjustment even for a sample having regions with different heights is proposed. A charged particle beam device according to the disclosure includes: a sample holder configured to hold a sample; a sample stage configured to move the sample; a charged particle gun and a charged particle beam column configured to irradiate the sample with a charged particle beam; an objective lens configured to perform focus adjustment by changing an intensity of a focusing effect on the charged particle beam; a detector configured to detect electrons from the sample and output a signal forming an electron image; an optical imaging device configured to capture an optical image of the sample; and a control device configured to calculate height information of the sample based on the optical image obtained by imaging the sample by the optical imaging device, and automatically set a focus adjustment value of an observation site based on the height information (see FIG.).

Charged particle beam apparatus and focus adjusting method therefor

There is provided a technique capable of shortening a photographing time and obtaining a more accurate photographed image when photographing a sample SAM using a charged particle beam device. The charged particle beam deviceincludes an electron gun, an objective lens, a stage, detectorsand, an integrated control unit C, a photographing function, and an autofocus function. Each of a plurality of photographing visual fields is focused in a focus value calculation visual fieldadjacent to a designated visual fielddesignated as a photographing target among the plurality of photographing visual fields, and a focus value calculated in the focus value calculation visual fieldis used for calculating focus values of each of the plurality of photographing visual fields.

Charged particle beam device

An object of the invention is to provide a device for observing the same field of view with a charged particle beam device and a camera without increasing a size of a housing. A charged particle beam device according to an aspect of the invention includes: a lens barrel that irradiates a sample with a charged particle beam; an imaging unit that images an optical image of the sample; a sample table on which the sample is placed; and a stage that is movable and on which the sample table is placed, wherein when a distance between a physical central axis of the sample table and a physical optical axis of the imaging unit is defined as a first distance, and a distance between a virtual central axis of the sample table and a physical central axis of the imaging unit, or between the physical central axis of the sample table and a virtual central axis of the imaging unit, or between the virtual central axis of the sample table and the virtual central axis of the imaging unit is defined as a second distance, the second distance is shorter than the first distance.

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Tokyo, Japan

Mai Yoshihara