Ngk Insulators, Inc.

Mai Minoura

Tomoyoshi Tai

Masashi Goto

A bonded body having a supporting substrate and piezoelectric material layer is provided. The supporting substrate is composed of mullite, and the material of the piezoelectric material layer is LiAOwhere A represents one or more element selected from the group consisting of niobium and tantalum. An interface layer is present along an interface between the supporting body and piezoelectric material layer, and a supporting substrate-side intermediate layer is present between the interface layer and supporting substrate. Each of the interface layer and supporting substrate-side intermediate layer contains oxygen, aluminum, silicon and one or more element selected from the group consisting of niobium and tantalum as main components.

Joined body and elastic wave element

A bonded body includes a supporting substrate and piezoelectric material layer. The supporting substrate is composed of sialon. The material of the piezoelectric material layer is LiAO(A represents one or more element selected from the group consisting of niobium and tantalum). It is included an interface layer present along an interface between the supporting body and piezoelectric material layer and a supporting substrate-side intermediate layer present between the interface layer and supporting substrate. Each of the interface layer and supporting substrate-side intermediate layer contains nitrogen, oxygen, aluminum, silicon and one or more element selected from the group consisting of niobium and tantalum as main components.

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Kasugai, Japan

Mai Minoura