Molecular Imprints, Inc.

Canon Nanotechnologies, Inc.

Mahadevan GanapathiSubramanian

Byung-Jin Choi

Mario Johannes Meissl

Sidlgata V Sreenivasan

Frank Y Xu

Gerard M Schmid

Michael Nevin Miller

Niyaz Khusnatdinov

Anshuman Cherala

Edward Brian Fletcher

Se-Hyuk Im

Avinash Panga

Byung Jin Choi

Nicholas A Stacey

Se Hyun Ahn

Control of lateral strain and lateral strain ratio (d/d) between template and substrate through the selection of template and/or substrate thicknesses (Tand/or T), control of template and/or substrate back pressure (Pand/or P), and/or selection of material stiffness are described.

Safe separation for nano imprinting

Methods and systems are provided for patterning polymerizable material dispensed on flexible substrates or flat substrates using imprint lithography techniques. Template replication methods and systems are also presented where patterns from a master are transferred to flexible substrates to form flexible film templates. Such flexible film templates are then used to pattern large area flat substrates. Contact between the imprint template and substrate can be initiated and propagated by relative translation between the template and the substrate.

Large area imprint lithography

In an imprint lithography system, a recessed support on a template chuck may alter a shape of a template positioned thereon providing minimization and/or elimination of premature downward deflection of outer edges of the template in a nano imprint lithography process.

Chucking system with recessed support feature

A template chuck includes multiple zones to provide 1) an imprint bend optimized to provide high curvature and provide contact at middle radius of substrate and/or, 2) separation bend zone with an increased free span zone and high crack angle.

Dual zone template chuck

The present invention provides a method for separating a mold from solidified imprinting material that includes creating deformation in the template in which the mold is included. The deformation is sufficient to create a returning force that is greater than an adhesion forced between the solidified imprinting material and the mold. For example, the deformation may result from a pressure differential created between the mold and a side of the template disposed opposite to the mold. In this manner, the distortion may be undulations in the template of sufficient magnitude to contact a substrate upon which the solidified imprinting material is disposed.

Technique for separating a mold from solidified imprinting material

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Cedar Park, TX, United States of America

Mahadevan GanapathiSubramanian