Applied Materials, Inc.

Madhukar Krishna

Michael Robert Rice

Steven D Marcus

Hanish Kumar Panavalappil Kumarankutty

Senthil Kumar Nattamai Subramanian

Kirubanandan Naina Shanmugam

Sriharsha Dharmapura Sathyanarayanamurthy

Sankar Menon Cherubala Pathayapura

Shivaprakash Padadayya Hiremath

Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a part coating reactor includes: a lower body and a lid assembly that together define and enclose an interior volume; one or more heaters disposed in the lid assembly; one or more coolant channels disposed in the lid assembly to flow a heat transfer medium therethrough; a plurality of gas passages disposed through the lid assembly to facilitate providing one or more gases to the interior volume, wherein the plurality of gas passages include a plurality of fluidly independent plenums disposed in the lid assembly; and one or more mounting brackets to facilitate coupling a workpiece to the lid assembly.

Atomic layer deposition part coating chamber

Growing community of inventors

Bengaluru, India

Madhukar Krishna