Asml Netherlands B.v.

Maarten Kees Jan Boon

Franciscus Johannes Joseph Janssen

Markus Franciscus Antonius Eurlings

Hermanus Johannes Maria Kreuwel

Hrishikesh Patel

Maikel Adrianus Cornelis Schepers

Dennis Jozef Maria Paulussen

Robertus Wilhelmus Veltman

Bernard Jacob Andries Stommen

Jacob Cohen

Pepijn Wijnand Jozef Janssen

A clamping device is constructed and arranged to clamp two parts together. The clamping device includes an aligner constructed and arranged to bring the two parts in an aligned position with respect to each other, a clamp constructed and arranged to maintain the two parts in the aligned position, a disconnect constructed and arranged to guide the two parts away from the aligned position to a disconnected position, and an actuator constructed and arranged to convert an electrical current to kinetic energy. The aligner, the clamp, and the disconnect are constructed and arranged to be driven by the actuator.

Clamping device, assembly and lithographic projection apparatus

A radiation source includes a fuel supply configured to deliver fuel to a plasma emission location for vaporization by a laser beam to form a plasma, and a collector configured to collect EUV radiation emitted by the plasma and direct the EUV radiation towards an intermediate focus. The collector includes a diffraction grating configured to diffract infrared radiation emitted by the plasma. The radiation source includes a radiation conduit located in between the collector and the intermediate focus. The radiation conduit includes an entrance aperture connected by an inwardly tapering body to an exit aperture. The radiation conduit includes an inner portion and an outer portion, the inner portion being closer to the intermediate focus than the outer portion. The inner portion is configured to reflect incident diffracted infrared radiation towards the outer portion.

Radiation conduit for radiation source

Growing community of inventors

Moergestel, Netherlands

Maarten Kees Jan Boon