Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno

Maarten Hubertus Van Es

Hamed Sadeghian Marnani

Paul Louis Maria Joseph Van Neer

Daniele Piras

Rutger Meijer Timmerman Thijssen

Abbas Mohtashami

Benoit Andre Jacques Quesson

Martinus Cornelius Johannes Maria Van Riel

Marcus Johannes Van Der Lans

Kodai Hatakeyama

Laurent Fillinger

Jacques Cor Johan Van Der Donck

Diederik Jan Maas

Lukas Kramer

Klara Maturova

Violeta Navarro Paredes

Chien-Ching Wu

Robert Wilhelm Willekers

Femke Chantal Tabak

Sri Ram Shankar Rajadurai

Benoit André Jacques Quesson

The present document relates to a method of performing acoustic scanning probe microscopy for imaging structures underneath a substrate surface, comprising: applying an acoustic input signal to the substrate having a frequency above 1 gigahertz, detecting a return signal, and analyzing the return signal for obtaining information on the embedded structures. The step of applying the acoustic input signal comprises applying a plurality of acoustic signal components which each include a selected frequency. The step of detecting includes detecting a response signal for each of the plurality of acoustic signal components. The frequencies are selected such that the components provide a composite signal being a pulse signal of limited time duration. The invention is further directed at a scanning probe microscopy system and a computer program product.

Method, system and computer program for performing acoustic scanning probe microscopy

Lithographic patterning method for creating features on a surface of a substrate, including the steps of: applying a resist material to the surface; performing resist processing steps, including at least: selectively exposing the resist material layer to a surface treatment step, wherein the resist material in the exposed locations is chemically modified; and developing the resist material layer to selectively remove the resist material locally. The method further comprises detecting, during or after the resist processing steps, a chemical modification of the resist material for monitoring or evaluating the processing steps. The step of detecting is performed by scanning the surface using a scanning probe microscopy device, and wherein the scanning includes contacting the surface with the probe tip in a probing area. The probing area coincides with at least one location of the exposed locations and non-exposed locations, for detecting the chemical modification. The document further describes a system.

Lithographic patterning method and system therefore

The present invention relates to a method of performing subsurface imaging of embedded structures in a substrate underneath a substrate surface, the method comprising the steps of applying, using a signal application actuator, an acoustic input signal to the substrate, detecting, using a vibration sensor, a return signal from the substrate and analyzing the return signal for obtaining information on the embedded structures, for enabling imaging thereof wherein the step of applying the acoustic input signal comprises applying a discontinuous signal of an acoustic signal component to the substrate, the acoustic signal component having a frequency above 1 gigahertz, such that the return signal includes a scattered fraction of the discontinuous signal scattered from the embedded structures. The invention further relates to a system.

Method of and system for performing subsurface imaging using vibration sensing

An ultrasound sub-surface probe microscopy device () is provided comprising a stage (), a signal generator (), a scanning head (), a signal processor () and a scanning mechanism (). In use, the stage () carries a sample () and the scanning mechanism () provides for a relative displacement between the sample () and the scanning head (), along the surface of the sample. The scanning head () comprises an actuator () configured to generate in response to a drive signal (S) from the signal generator () an ultrasound acoustic input signal (I). The generated ultrasound acoustic input signal (I) has at least one acoustic input signal component (I) with a first angular frequency (ω). The scanning head () further comprises a tip () to transmit the acoustic input signal (I) through a tip-sample interface () as an acoustic wave (W) into the sample. Due to a non-linear interaction in the tip-sample interface () at least one up mixed acoustic signal component (W) in said acoustic wave that has a second angular frequency (ω) higher than the first angular frequency (ω) Contrary to known approaches, the sensor signal (S) provided by the sensor facility is indicative for a contribution (W') of the at least one up mixed acoustic signal component in reflections (W′) of the acoustic wave within the sample (). Therewith a relatively high resolution can be achieved with which subsurface features can be detected.

Ultrasound sub-surface probe microscopy device and corresponding method

The present invention relates to a heterodyne scanning probe microscopy method for imaging structures on or below the surface of a sample, the method including applying, using a transducer, an acoustic input signal to the sample sensing, using a probe including a probe tip in contact with the surface, an acoustic output signal, wherein the acoustic output signal is representative of acoustic surface waves induced by the acoustic input signal wherein the acoustic input signal comprises at least a first signal component having a frequency above 1 gigahertz, and wherein for detecting of the acoustic output signal the method comprises a step of applying a further acoustic input signal to at least one of the probe or the sample for obtaining a mixed acoustic signal, the further acoustic input signal including at least a second signal component having a frequency above 1 gigahertz, wherein the mixed acoustic signal comprises a third signal component having a frequency equal to a difference between the first frequency and the second frequency, wherein the frequency of the third signal component is below 1 gigahertz.

Heterodyne scanning probe microscopy method and system

A cantilever () for an ultrasound acoustic microscopy device is provided comprising a transmission tip () to contact a sample () to therewith transmit an ultrasound acoustic signal as an ultrasound acoustic wave into the sample. The cantilever further comprises a reception tip () separate from the transmission tip () to contact the sample to receive an acoustic signal resulting from reflections of the ultrasound wave from within the sample.

Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the same

The surface of the atomic force microscopy (AFM) cantilever is defined by a main cantilever body and an island. The island is partly separated from the main body by a separating space between facing edges of the main body and the island. At least one bridge connects the island to the main body, along a line around which the island is able to rotate through torsion of the at least one bridge. The island has a probe tip located on the island at a position offset from said line and a reflection area. In an AFM a light source directs light to the reflection area and a light spot position detector detects a displacement of a light spot formed from light reflected by the reflection area, for measuring an effect of forces exerted on the probe tip.

Atomic force microscopy cantilever, system and method

The present document relates to a heterodyne scanning probe microscopy (SPM) method for subsurface imaging, and includes: applying an acoustic input signal to a sample and sensing an acoustic output signal using a probe. The acoustic input signal comprises a plurality of signal components at unique frequencies, including a carrier frequency and at least two excitation frequencies. The carrier frequency and the excitation frequencies form a group of frequencies, which are distributed with an equal difference frequency between each two subsequent frequencies of the group. The difference frequency is below a sensitivity threshold frequency of the cantilever for enabling sensing of the acoustic output signal. The document also describes an SPM system.

Heterodyne scanning probe microscopy method and scanning probe microscopy system

A method and system for performing subsurface atomic force microscopy measurements, the system comprising: a signal source for generating an drive signal; a transducer configured to receive the drive signal for converting the drive signal into vibrational waves and coupling said vibrational waves into a stack comprising a sample for interaction with subsurface features within said sample; cantilever tip for contacting the sample for measuring surface displacement resulting from the vibrational waves to determine subsurface features; wherein the system includes a measurement device for measuring a measurement signal returning from the transducer during and/or in between the subsurface atomic force microscopy measurements.

Frequency tracking for subsurface atomic force microscopy

The document relates to a method of performing subsurface imaging of embedded structures underneath a substrate surface, using an atomic force microscopy system. The system comprises a probe with a probe tip, and a sensor for sensing a position of the probe tip. The method comprises the steps of: positioning the probe tip relative to the substrate: applying a first acoustic input signal to the substrate; applying a second acoustic input signal to the substrate; detecting an output signal from the substrate in response to the first and second acoustic input signal; and analyzing the output signal. The first acoustic input signal comprises a first signal component and a second signal component, the first signal component comprising a frequency below 250 megahertz and the second signal component either including a frequency below 2.5 megahertz or a frequency such as to provide a difference frequency of at most 2.5 megahertz with the first signal component, such as to enable analysis of an induced stress field in the substrate; and wherein the second acoustic input signal comprises a third signal component having a frequency above 1 gigahertz, such that the return signal includes a scattered fraction of the second acoustic input signal scattered from the embedded structures. This enables to perform imaging a various depths in one pass, across a large range of depths.

Method of and atomic force microscopy system for performing subsurface imaging

A method of performing atomic force microscopy (AFM) measurements, uses an ultrasound transducer to transmit modulated ultrasound waves with a frequency above one GHz from the ultrasound transducer to a top surface of a sample through the sample from the bottom surface of the sample. Effects of ultrasound wave scattering are detected from vibrations of an AFM cantilever at the top surface of the sample. Before the start of the measurements, a drop of a liquid is placed on a top surface of the ultrasound transducer. The sample is placed on the top surface of the ultrasound transducer, whereby the sample presses the liquid in the drop into a layer of the liquid between the top surface of the ultrasound transducer and a bottom surface of the sample. The AFM measurements are started after a thickness of the layer of the liquid has stabilized.

Method of performing atomic force microscopy with an ultrasound transducer

Atomic force microscopy system comprising an atomic force microscopy device and a substrate carrier having a carrier surface carrying a substrate. The substrate has a substrate main surface and a substrate scanning surface opposite the substrate main surface. The atomic force microscopy device comprises a scan head including a probe. The probe comprises a cantilever and a probe tip arranged on the cantilever. The atomic force device further comprises an actuator cooperating with at least one of the scan head or the substrate carrier for moving the probe tip and the substrate carrier relative to each other in one or more directions parallel to the carrier surface for scanning of the substrate scanning surface with the probe tip. A signal application actuator applies, during said scanning, an acoustic input signal to the substrate, said acoustic input signal generating a first displacement field in a first displacement direction only. A tip position detector monitors motion of the probe tip relative to the scan head during said scanning for obtaining an output signal. The tip position detector is arranged for monitoring motion of the probe tip only in a direction orthogonal to the displacement direction.

Atomic force microscopy system, method for mapping one or more subsurface structures located in a semiconductor device or for monitoring lithographic parameters in a semiconductor device and use of such an atomic force microscopy system

An atomic force microscopy device arranged for determining sub-surface structures in a sample comprises a scan head with a probe including a flexible carrier and a probe tip arranged on the flexible carrier. Therein an actuator applies an acoustic input signal to the probe and a tip position detector measures a motion of the probe tip relative to the scan head during scanning, and provides an output signal indicative of said motion, to be received and analyzed by a controller. At least an end portion of the probe tip tapers in a direction away from said flexible carrier towards an end of the probe tip. The end portion has a largest cross-sectional area Amax at a distance Dend from said end, the square root of the largest cross-sectional area Amax is at least 100 nm and the distance Dend is in the range of 0.2 to 2 the value of said square root.

Atomic force microscopy device, method and lithographic system

The present document relates to a anatomic force microscope comprising a probe comprising a probe tip configured to sense a sample disposed proximate to the probe tip, a detector to detect a deflection of the probe tip, an actuator coupled to the probe and configured to move the probe in a sense state with the sample at a predetermined force set point and a vibrator in communication with the sample to provide a vibration to the sample, the vibration comprising a modulation frequency, wherein the acoustic vibrator is configured to provide the vibration in a modulation period after an initial sense period without modulation and wherein the probe is moved during or after said modulation period to a successive sample position over said sample while moving the probe in a non-contact state.

Method of and system for performing detection on or characterization of a sample

A method to perform sub-surface detection of nanostructures in a sample, uses an atomic force microscopy system that comprising a scan head having a probe with a cantilever and a probe tip arranged on the cantilever. The method comprises: moving the probe tip and the sample relative to each other in one or more directions parallel to the surface for scanning of the surface with the probe tip; and monitoring motion of the probe tip relative to the scan head with a tip position detector during said scanning for obtaining an output signal. During said scanning acoustic vibrations are induced in the probe tip by applying a least a first and a second acoustic input signal respectively comprising a first and a second signal component at mutually different frequencies above IGHz, differing by less than IGHz to the probe, and analyzing the output signal for mapping at least subsurface nanostructures below the surface of the sample.

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Voorschoten, Netherlands

Maarten Hubertus Van Es