Scinvivo B.v.

Maaike De Jong

Hendrikus Wilhelmus Leonardus Antonius Maria Van Lierop

Geert Claassen

A forward looking MEMS based OCT probe () is provided that comprises an elongate probe housing () having at a first end a probe interface () for an optic fibre (), and at a second opposite end a viewing window (). The probe housing accommodates a MEMS mirror () for sweeping a hght beam () through the viewing window and for reflecting light received through the viewing window towards the probe interface, wherein a rotation axis () of the MEMS mirror extends transverse to a longitudinal axis () defined by the probe housing. The MEMS mirror () has a stator (), a rotor (), and an actuator () with at least one pair of mutually interdigitated comb elements including at least a first comb element fixed to the stator defining a reference plane and at least a second comb element fixed to the rotor and that is further coupled at mutually opposite sides via a respective torsion beam (A,B) to the stator. The rotor has a rotor body (RB) and a rotor support (RS), fixed at a first face of the rotor body, that keeps the rotor body at a distance from the stator within said rotation range, the rotor body having a mirror surface (MS) at a second face opposite the first face, the MEMS mirror comprising the stator () and the rotor support (RS) at mutually opposite sides of the reference plane (RP).

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Eindhoven, Netherlands

Maaike De Jong