Sandia Corporation

Memx, Inc.

Becton Dickinson and Company Limited

Other

M Steven Rodgers

Jeffry Joseph Sniegowski

Samuel Lee Miller

Paul Jackson McWhorter

Brian D Jensen

Stephen M Barnes

Michael S Burg

Joel A Hetrick

Sridhar Kota

Thomas W Krygowski

One embodiment of a MEMS flow module () includes a first plate () and a second plate () that are separated by a first link (). A plurality of concentrically disposed, annular flow-restricting walls () extend from the first plate (), and each is separated from the second plate () by a flow-restricting gap (). When the MEMS flow module () is exposed to a differential pressure and in one configuration, a perimeter () of the first plate () flexes away from the second plate () (and at least generally about where the first link () interfaces with the first plate ()) to increase the size of one or more of the flow-restricting gaps (), to in turn accommodate an increased flow or flow rate through the MEMS flow module ().

Glaucoma implant having MEMS flow module with flexing diaphragm for pressure regulation

Various MEMS filter elements or modules are disclosed, and which may be used in a glaucoma implant (). One such MEMS filter module () includes a first film () and a second film () that are spaced and interconnected by a plurality of supports (). A plurality of first flow ports () extend through the first film (), and a plurality of second flow ports () extend through the second film (). A plurality of annular filter walls () extend from the second film () toward the first film (), and are separated therefrom by a filter trap gap ().

Glaucoma implant having MEMS filter module

Various embodiments of MEMS flow modules that may be disposed in a flow path () of a shunt () are disclosed, where the shunt () may be used to control a flow out of an anterior chamber () of an eye (). One such MEMS flow module () has a tuning element () and a lower plate (). A plurality of springs or spring-like structures () interconnect the tuning element () with the lower plate () in a manner that allows the tuning element () to move either toward or away from the lower plate (), depending upon the pressure being exerted on the tuning element () by a flow through a lower flow port () on the lower plate (). The tuning element () is disposed over this lower flow port () to induce a flow through the MEMS flow module () along a non-linear (geometrically) flow path.

Implant having MEMS flow module with movable, flow-controlling baffle

Various MEMS filter elements or modules are disclosed. One such MEMS filter module () includes a first film () and a second film () that are spaced and interconnected by a plurality of supports (). A plurality of first flow ports () extend through the first film (), and a plurality of second flow ports () extend through the second film (). A plurality of annular filter walls () extend from the second film () toward the first film (), and are separated therefrom by a filter trap gap (). A filter trap chamber () is disposed on each side of each filter trap gap (). Therefore, fluid will flow into one filter trap chamber (), through a filter trap gap (), and into another filter trap chamber (), whether the flow is introduced into the filter module () through the first flow ports () or the second flow ports ().

MEMS filter module

Various embodiments of tunable capacitors are disclosed. One embodiment is in the form of a tunable capacitor () having a pair of stationary capacitor electrodes () that are fixed to and disposed the same distance above a substrate () in the vertical dimension. A tuning element () is suspended above the substrate () by an elevation system () that accommodates movement of the tuning element () in the vertical dimension. Changing the capacitance of the tunable capacitor () is accomplished by moving the tuning element () in the vertical dimension.

Tunable MEMS capacitor

Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Surface micromachined optical system with reinforced mirror microstructure

Various methods for forming surface micromachined microstructures are disclosed. One aspect relates to executing surface micromachining operation to structurally reinforce at least one structural layer in a microstructure. Another aspect relates to executing the surface micromachining operation to form a plurality of at least generally laterally extending etch release channels within a sacrificial material to facilitate the release of the corresponding microstructure.

Method for making a microstructure by surface micromachining

A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 &mgr;m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

Surface-micromachined rotatable member having a low-contact-area hub

A compact electrostatic actuator is disclosed for microelectromechanical (MEM) applications. The actuator utilizes stationary and moveable electrodes, with the stationary electrodes being formed on a substrate and the moveable electrodes being supported above the substrate on a frame. The frame provides a rigid structure which allows the electrostatic actuator to be operated at high voltages (up to 190 Volts) to provide a relatively large actuation force compared to conventional electrostatic comb actuators which are much larger in size. For operation at its maximum displacement, the electrostatic actuator is relatively insensitive to the exact value of the applied voltage and provides a self-limiting displacement.

Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement

Surface&mdash;micromachined rotatable member having a low-contact-area hub

A microelectromechanical (MEM) ratcheting apparatus is disclosed which includes an electrostatic or thermal actuator that drives a moveable member in the form of a ring gear, stage, or rack. Motion is effected by one or more reciprocating pawls driven by the actuator in a direction that is parallel to, in line with, or tangential to the path. The reciprocating pawls engage indexing elements (e.g. teeth or pins) on the moveable member to incrementally move the member along a curved or straight path with the ability to precisely control and determine the position of the moveable member. The MEM apparatus can be formed on a silicon substrate by conventional surface micromachining methods.

Growing community of inventors

Albuquerque, NM, United States of America

M Steven Rodgers