Fluoroware, Inc.

Lynn Milbrett

Alexander N Rossi

A remote recognition system for monitoring the progress of a plurality of batches of semiconductor wafers or memory disks through a series of processing operations based on bar code recognition technology. Each batch is placed in a carrier in which it is transported to various locations where processing operations are performed. Each carrier is provided with an optically visible bar code tag, coded to be responsive to within reading range of a bar code reader unit which transmits a modulated light beam signal to the coded bar code tag and reads and decodes the light beam reflected back and collected by an optical receiver to uniquely identify the carrier that is positioned within range of the reader unit. Information from the reader units to permit monitoring the progress of semiconductor wafer or memory disk batches through multiple processing operations is received by further control apparatus. The novel bar coded carrier for use with this remote recognition system uses a bar code tag encapsulated in an external wall of the carrier, so that the bar code tag is protected from harsh chemical environments encountered by the process carrier while it remains readable by the various bar code reader units.

Bar code remote recognition system for process carriers of wafer disks

A disk shipper is configured so as to allow the disk contents to be handled either by their internal diameter or by their external diameter. The bottom of the disk shipper is further configured so as to be compatible with certain existing disk carriers in transferring the disk contents to the particular disk carrier and vice versa. Since the particular disk carrier with which the bottom of the disk shipper is compatible prohibits external diameter handling, the novel disk shipper bottom facilitates transposing the disks into a configuration that permits both external and internal diameter handling. Supporting members inside the disk shipper maintain the disks in axial alignment preventing relative motion of the disks during handling.

Disk shipper

A disk shipper and transfer tray are configured so as to allow the disk contents to be handled either by their internal diameter or by their external diameter. The transfer tray and the bottom of the disk shipper are further configured so as to be compatible with certain existing disk carriers in transferring the disk contents of the transfer tray or the bottom of the disk shipper to the particular disk carrier and vice versa. Since the particular disk carrier with which the transfer tray and the bottom of the disk shipper are compatible prohibits external diameter handling, the novel disk shipper bottom and transfer tray facilitate transposing the disks into a configuration that permits both external and internal diameter handling.

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Young America, MN, United States of America

Lynn Milbrett