Analog Devices International Unlimited Company

Agency for Science, Technology and Research

Lynn Khine

Paul Martin Lambkin

Seamus Paul Whiston

Michael John Flynn

Kotlanka Rama Krishna

Christina B McLoughlin

Ming Lin Julius Tsai

A microelectromechanical system (MEMS) device is provided that includes a substrate having a dielectric cavity formed therein and a movable electromechanical device suspended in the dielectric cavity. The dielectric cavity includes a substantially planar bottom surface and at least one sidewall surface extending substantially perpendicularly from the bottom surface. The movable electromechanical device is suspended in the dielectric cavity such that the movable electromechanical device is spaced apart from the bottom surface and the at least one sidewall surface of the dielectric cavity. The bottom surface of the cavity and each of the at least one sidewall surface of the cavity meet at a rectilinear corner.

Suspended microelectromechanical system (MEMS) devices

Suspended microelectromechanical systems (MEMS) devices including a stack of one or more materials over a cavity in a substrate are described. The suspended MEMS device may be formed by forming the stack, which may include one or more electrode layers and an active layer, over the substrate and removing part of the substrate underneath the stack to form the cavity. The resulting suspended MEMS device may include one or more channels that extend from a surface of the device to the cavity and the one or more channels have sidewalls with a spacer material. The cavity may have rounded corners and may extend beyond the one or more channels to form one or more undercut regions. The manner of fabrication may allow for forming the stack layers with a high degree of planarity.

Planar processing of suspended microelectromechanical systems (MEMS) devices

According to embodiments of the present invention, a piezoelectric resonator is provided. The piezoelectric resonator includes a piezoelectric substrate, a first electrode comprising a first plurality of electrode fingers, a second electrode comprising a second plurality of electrode fingers, wherein the first plurality of electrode fingers and the second plurality of electrode fingers are interdigitated, and wherein electrode patches are arranged along the first plurality of electrode fingers and the second plurality of electrode fingers according to a 2-dimensional lattice.

Piezoelectric resonator having electrode fingers with electrode patches

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Singapore, Singapore

Lynn Khine