Bei Technologies, Inc.

University of California

University of Southern California

Lynn Edward Costlow

Cenk Acar

Asad M Madni

Minyao Mao

Andrei M Shkel

Eun Sok Kim

Jim B Vuong

Adam Schofield

Qiang Zou

Roger Wells

A method of operating an anti-phase six degree-of-freedom tuning fork gyroscope system comprises the steps of driving a first three degree-of-freedom gyroscope subsystem, and driving a second three degree-of freedom gyroscope subsystem in an anti-phase mode with the first gyroscope subsystem at an anti-phase resonant frequency. Acceleration or an angular rate of motion is sensed by the first and second three degree-of-freedom gyroscope subsystems operating in a flat frequency response range where the anti-phase resonant frequency is designed. Response gain and phase are stable and environmental and fabrication perturbations are avoided by such operation. A anti-phase six degree-of-freedom tuning fork gyroscope system which operates as described is also characterized.

Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same

A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the sensitivity separate from the bandwidth. The sensor can sense three dimensionally, or can only sense in a single plane. Vibration cancellation may be provided.

Silicon inertial sensors formed using MEMS

Rate sensor having a plurality of generally planar masses, a drive axis in the plane of each of the masses, an input axis perpendicular to the drive axes, and sense axes perpendicular to the drive axes and the input axis. The masses are driven to oscillate about the drive axes and are mounted for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the torsional movement about the sense axis for monitoring rate of rotation.

Torsional rate sensor with momentum balance and mode decoupling

Rate sensor having a plurality of generally planar masses, a drive axis in the planes of the masses, an input axis perpendicular to the drive axis, and sense axes perpendicular to the drive axis and the input axis. The masses are driven to oscillate about the drive axes and are mounted for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the torsional movement about the sense axis for monitoring rate of rotation.

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Clayton, CA, United States of America

Lynn Edward Costlow