Cascade Microtech, Inc.

Formfactor Beaverton, Inc.

Lynh Thuy Bui

Richard Lynn Campbell

Daniel Mark Bock

Michael Andrews

Samantha Nhim

Test standards and methods for impedance calibration of a probe system and probe systems that include the test standards and/or utilize the methods are disclosed herein. The test standards include at least one test structure. In some embodiments, the test standard further includes an alignment structure that is associated with the test structure. In some embodiments, the test standards include a plurality of test structures. In some embodiments, the plurality of test structures includes a thin film thru test structure and a thin film offset test structure. In some embodiments, the plurality of test structures is positioned to simultaneously contact a plurality of probe regions of a probe head. The methods include methods of calibrating a probe system.

Test standards and methods for impedance calibration of a probe system, and probe systems that include the test standards or utilize the methods

A high frequency probe has contact tips located within the periphery of a terminal section of a coaxial cable and shielded by a ground conductor of the coaxial cable.

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Tigard, OR, United States of America

Lynh Thuy Bui