Carl Zeiss Microscopy Gmbh

Luyang Han

Martin Edelmann

Josef Biberger

Andreas Schmaunz

Stefan Meyer

Wolfgang Berger

Joerg Fober

A method generates a crystalline orientation map of a surface portion of a sample. A crystalline orientation map represents crystalline orientations at a plurality of sample locations of the surface portion. The method comprises recording an image of the surface portion including a central location using particles of a charged particle beam directed to the surface portion and backscattering from the surface portion for each of a plurality of different orientation settings. Each of the orientation settings is defined by an azimuthal angle and an elevation angle under which the charged particle beam is incident onto the central location during the recording of the respective image. The method also includes generating the crystalline orientation map based on the recorded images.

Method of generating a crystalline orientation map of a surface portion of a sample and computer program product

A method of operating a particle beam device for imaging, analyzing and/or processing an object may be carried out, for example, by a particle beam device. The method may include: identifying at least one region of interest on the object; defining: (i) an analyzing sequence for analyzing the object, (ii) a processing sequence for processing the object by deformation and (iii) an adapting sequence for adapting the at least one region of interest depending on the processing sequence and/or on the analyzing sequence; processing the object by deformation according to the processing sequence and/or analyzing the object according to the analyzing sequence; adapting the at least one region of interest according to the adapting sequence; and after or while adapting the at least one region of interest, imaging and/or analyzing the at least one region of interest using a primary particle beam being generated by a particle beam generator.

Operating a particle beam device

A method of generating a result image of an object using a particle beam system includes recording multiple primary images of a region of the object using the particle beam system. Recording of each of the primary images includes scanning the primary particle beam along a scan direction across the region and detecting secondary particles generated thereby. The scan directions used for recording at least one pair of two of the primary images differ at least by a first threshold value of at least 10&#xb0;. The method also includes generating, based on the multiple primary images, the result image representing the region of the object.

Method for generating a result image

A method of recording an image using a particle microscope includes recording of plural images of an object. Each of the recorded images is associated with image data including intensity values associated with locations in a coordinate system of the recorded image. The method further includes: determining displacements between the coordinate systems of the image data of the recorded images; determining a bounding box of a resulting image based on the determined displacements; and calculating image data of the resulting image based on the intensity values of the image data of the recorded images associated with those locations which are located within the determined bounding box associated with the resulting image based on the determined displacements of the recorded images.

Method of recording an image using a particle microscope and particle microscope

An electron beam microscope includes an energy-sensitive detector to detect backscattered electrons and a signal processor for processing detection signals of the detector. The signal processor includes an analog amplifier. The signal processor also includes a window comparator having a signal input connected to an output of the analog amplifier. A signal generated at an output of the signal processor is generated based on a signal provided at an output the window comparator. The window comparator is configured to output a predetermined signal only if the amplified signal supplied to its signal input is less than or equal to an upper threshold and greater than or equal to a lower threshold.

Electron beam microscope

Operating a pressure system of a device for imaging, analyzing and/or processing an object, and a particle beam device for carrying out this method. In particular, the particle beam device is an electron beam device and/or an ion beam device. The method may include disconnecting a pump from a pressure reservoir, connecting the pressure reservoir to a vacuum chamber, measuring a reservoir pressure existing in the pressure reservoir, determining a first pressure value of the reservoir pressure at a first time and a second pressure value of the reservoir pressure at a second time, determining a functional relationship between the first pressure value of the reservoir pressure and the second pressure value of the reservoir pressure, extrapolating the functional relationship for times later than the second time, determining a threshold time using the extrapolated functional relationship, and determining a remaining time period until the reservoir pressure reaches the pressure threshold.

Method for operating a pressure system of a device for imaging, analyzing and/or processing an object and a device for carrying out the method

The system described herein relates to a method for generating a composite image of an object using, for example, a particle beam device such as an electron beam device and/or an ion beam device. A composite image is generated by relatively arranging a first sub image to a second sub image such that the first sub image overlaps the second sub image in the entire common region, a calculated first image position of a first marking in the first sub image is arranged on the first image position of the first marking in the second sub image, and a calculated second image position of a second marking in the first sub image is arranged on the second image position of the second marking in the second sub image.

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Heidenheim, Germany

Luyang Han