Centrotherm Elektrische Anlagen Gmbh & Co.

Veb Elektromat Dresden

Centrotherm Clean Solutions Gmbh + Co. Kg

Lutz Fabian

Dietmar Resch

Gunter Krodel

Volkmar Hopfe

Rolf Hartung

Rainer Moller

Hans Autenrieth

Gunter Kroedel

Hort Stelzer

The invention relates to an emission control system for removing environmentally harmful and/or toxic gases or vapors, comprising a reaction chamber which is connected to a plasma source, whereby plasma is formed in said reaction chamber by injecting excitation energy, and the reaction chamber and/or the plasma source has at least one inlet for the introduction of gases or vapors and one outlet for the gases or vapors which are treated in the plasma source and/or reaction chamber. According to the invention, the outlet of the reaction chamber is connected to a liquid jet pump which produces a low pressure in the reaction chamber and in the plasma source. The waste gases with the plasma or the waste gases which are treated by excited particles are jointly conducted along with the liquid which is circulated through the liquid jet pump, mixed therewith and discharged from said reaction chamber.

Emission control system

The present invention relates to a method for purifying process waste gases by introducing them into a waste gas purification system that includes a reaction chamber and by post-treating the reaction products that leave the reaction chamber in a washing or sorbtion chamber with an associated washing agent circuit. The type and amount of harmful substances in the process waste gas are continuously measured before the waste gases enter the waste gas purification system. In addition, the type and amount of harmful substances in the reaction products that leave the waste gas purification system are simultaneously determined directly at the exit of the system and the measuring signals are used to regulate the operating parameters of the waste gas purification system.

Method for purifying process waste gases

Apparatus for purifying waste gases

An apparatus for the gas-phase processing of disk-shaped workpieces serves for maintaining cleanliness of the processing space and the workpiece or for avoiding deposits on parts of the workpiece which are not inteded to be coated. In particular a second inner wall system, which is permeable to gas, is provided for the aforementioned purposes. This second inner wall system is associated with a flushing gas system.

Apparatus for the gas-phase processing of disk-shaped workpieces

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Dresden, Germany

Lutz Fabian