Leybold Aktiengesellschaft

Leybold Vakuum Gmbh

Leybold-heraeus Gmbh

Balzers Und Leybold Deutschland Holding Ag

Oerlikon Leybold Vacuum Gmbh

Lutz Arndt

Peter Muller

Winfried Kaiser

Thomas Abelen

Dieter Vorberg

Hanns-Peter Berges

Thomas Dreifert

Wolfgang Leier

Paul Bachmann

Michael H&ouml;lzemer

Peter Müller

J&uuml;rgen Meyer

Frank Sch&ouml;nborn

A multi-chamber installation () treats objects under vacuum. An evacuation system () is connected to a plurality of chambers (). To reduce the complexity of the evacuation process, a forepump () has several stages (). Each of said stages is connected to one of the chambers ().

Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor

A dry compressing vacuum pump ( ) has a continuous or graduated inner compression. A gas ballast device ( ) selectively adds a ballast gas to a pumped gas. The gas ballast device has an isolating valve ( ), a non-return valve ( ) which prevents the escape of gases from the pump through the gas ballast device to the outside, and a pressure differential valve ( ).

Dry compressing vacuum pump having a gas ballast device

Two-stage rotary vane vacuum pump

Vacuum pump with a gas ballast device

Integrated oil pump rotor and coupling piece for an oil-sealed vacuum

Vacuum pump with oil separator

A two-stage rotary vane vacuum pump includes a pre-vacuum stage having a pre-vacuum pumping chamber and an outlet valve; a main oil sump; and a first oil conduit having a first opening communicating with the main oil sump and a second opening communicating with the pre-vacuum pumping chamber. The first opening is located at a level below an operational oil level in the main oil sump. There is further provided an intermediate oil sump situated at a level above the outlet valve and being arranged for receiving oil from the pre-vacuum pumping chamber; and a second oil conduit leading from the intermediate oil sump to components of the vacuum pump to be supplied with oil. All such components are situated at a level below the intermediate oil sump.

Method and apparatus for supplying oil to a vacuum pump

The invention relates to a method of making a pump ring for a two-stage vacuum pump (1) with a one-piece rotor system (14) having three sections (14a, b, c), whose end sections (14a and 14c form the two pumping stages and whose middle section (14b) forms an intermediate bearing, the diameters of the bearing section (14band of the rotor section (14a) forming the forepumping stage being equal. To reduce the tolerances that occur it is proposed that two bores be made in a single set-up from one end of a substantially cylindrical workpiece, the one forming the anchor contact (51) of the forepumping stage as well as the bearing bore (12) and the other forming the anchor contact (52) of the high-vacuum stage, and that before or after these bores aremade, additional bores (11, 13) are made in order to form the pump chambers (21, 17).

Method for assembling a one-piece rotor system and a pump ring for a

A rotary vane vacuum pump includes a pump housing; a bearing support having a bearing bore; a drive motor having an output shaft extending into the bearing bore; and a pump rotor accommodated in the pump housing and having a rotor shaft extending into the bearing bore. The rotor shaft and the output shaft have respective radial end faces oriented towards one another and the output shaft and the rotor shaft have identical diameters. There is further provided a torque-transmitting coupling connecting the output shaft with the rotor shaft at respective radial end faces thereof; a first sealing ring situated in the bore and sealingly surrounding the output shaft; a second sealing ring situated in the bore and sealingly surrounding the rotor shaft; and a lubricant chamber formed by a part of the bearing bore and being bounded and sealed by the first and second sealing rings.

Rotary vane vacuum pump with shaft seal

A vacuum pump and trap combination in which the trap is configured in the manner of a siphon and comprises a tube immersed in trap liquid but having an opening lying above the trap liquid level. The tube has a wall section lying below the trap liquid level and having perforations therein to admit different amounts of trap liquid in relation to the rate of discharge gas flow, thereby preventing frothing of the trap liquid.

Vacuum pump and trap combination

Growing community of inventors

Troisdorf, Germany

Lutz Arndt