Chung Shan Institute of Science and Technology

Neostones Micro Fabrication Corporation

Lung-Yung Lin

Kye-Chyn Ho

Schiu Sche

Yuan Lo

Chih-Wei Tseng

Mi-Hsiang Wen

Deng-Horng Tsai

Hsueh-Ming Steve Wang

A micro accelerometer including a plurality of proof masses is provided to detect the acceleration of the first axis, the second axis and the third axis. The disclosed micro accelerometer has the advantages of close loop control, mechanical decoupling, and not relying on high aspect ratio manufacturing technology.

Micro accelerometer

A micro angular rate-sensing device is provided. A vibrator, having a plurality of proof masses connected to a ring, is arranged in a first base. Flexible supporting members connect to the vibrator to suspend the vibrator in the first base. Electrodes drive the vibrator to oscillate and control the oscillation mode of the vibrator in driving mode. Planar electrodes are arranged relative to the proof masses on a second base. The motion of the proof masses relative to the planar electrodes is sensed through the capacitance between the proof masses and the planar electrodes. The resonant structure with greater mass of the device generates greater Coriolis force and increases the sensing area. Thus, the intensity of sensed signals and noise-signal ratio are greatly increased. Furthermore, the device does not rely much on high aspect ratio manufacturing technology. Thus the manufacturing cost is reduced and the yield rate is increased.

Micro angular rate sensor

In order to develop a production type of ring laser gyroscope (RLG), the determination of a laser plane for the assembly of the optical mirrors in a RLG block is needed. The new methods for measuring RLG cavities and for calculating the accuracy of the laser plane are developed. The optimum reflecting points and the error tolerances of the laser beams are obtained by using these methods. The advantages of these new methods are that both the design accuracy and the production time of the RLG block can be reduced as well as the yield rate of RLG could increase.

Method for measurement and verification of the optimum optical path for ring laser gyroscope

Growing community of inventors

Hsinchu, Taiwan

Lung-Yung Lin