Globalfoundries Singapore Pte. Ltd.

Lulu Peng

Lawrence Selvaraj Susai

Donald Ray Disney

Chor Shu Cheng

Zishan Ali Syed Mohammed

Yong Chau Ng

Rajesh Sankaranarayanan Nair

Juan Boon Tan

Wanbing Yi

Luke G England

Khee Yong Lim

Yun Ling Tan

Mahesh Bhatkar

Liang Li

Kai Hung Alex See

Jiacheng Lei

James Jerry Joseph

Nuraziz Yosokumoro

Nur Aziz Yosokumoro

A semiconductor device may include: a substrate; a protective region provided over the substrate; and a core structure enclosed by the protective region. The core structure may include a core material etchable by a chemical solution. The protective region may include a protective material resistant to etching by the chemical solution. The core structure may have a first side and a second side opposite to the first side, the first side being closer to the substrate than the second side. The core structure may be narrowest at the first side of the core structure.

Semiconductor devices and methods of fabricating a semiconductor device

An inductive device may be provided, including a first winding layer, a second winding layer arranged over the first winding layer and connected to the first winding layer to form a plurality of turns around a first axis, and a magnetic core arranged vertically between the first winding layer and the second winding layer. The magnetic core may include a portion entirely over the first winding layer and entirely under the second winding layer, where this portion may include a magnetic segment and a non-magnetic segment arranged laterally adjacent to each other along the first axis.

Inductive devices and methods of fabricating inductive devices

A semiconductor device is provided. The semiconductor device comprises an inductor in a far back end of line layer and a capacitor adjacent to and electrically coupled with the inductor. The capacitor comprises a first electrode layer arranged over sidewalls and a bottom surface of a via in a first insulating layer A dielectric layer is provided over the first electrode layer. A second electrode layer is provided over the dielectric layer and a metal fill layer is provided over the second electrode layer. The metal fill layer has a top surface at least level with a top surface of the first insulating layer.

Inductor capacitor filter in far back end of line and integration schemes

An inductive device may be provided, including a substrate and an inductive structure arranged over the substrate. The inductive structure may include a bottom metal winding layer; a top metal winding layer arranged further away from the substrate than the bottom metal winding layer; a magnetic core layer arranged between the bottom metal winding layer and the top metal winding layer; a connector arranged to electrically connect the bottom metal winding layer and the top metal winding layer; and a top metal ring element arranged around the top metal winding layer, spaced apart from the top metal winding layer. The inductive device may further include a guard ring element arranged under the top metal ring element and around the magnetic core layer, spaced apart from the magnetic core layer; wherein the guard ring element may include a magnetic material.

Inductive devices and methods of forming inductive devices

A transistor device may be provided, including a substrate; a buffer layer arranged over the substrate; a source terminal, a drain terminal, and a gate terminal arranged over the buffer layer; a barrier layer arranged over the buffer layer; and a passivation layer arranged over the barrier layer. The gate terminal may be arranged laterally between the source terminal and the drain terminal, the barrier layer may include a recess laterally between the gate terminal and the drain terminal, a part of the gate terminal may be arranged over the passivation layer and the passivation layer may extend into the recess of the barrier layer.

Transistor devices and methods of forming transistor devices

Integrated circuits (ICs) and method for forming IC devices are presented. In one embodiment, a method of forming a device with an integrated magnetic component using 3-dimensional (3-D) printing is disclosed. The method includes providing a substrate with a base dielectric layer, the base dielectric layer serves as a base for the integrated magnetic component. A first metal layer is formed on the substrate by spray coating metal powder over the substrate and performing selective laser melting on the metal powder. A magnetic core is formed on the substrate by spray coating magnet powder over the substrate and performing selective laser sintering on the magnet powder. A second metal layer is formed on the substrate by spray coating metal powder over the substrate and performing selective laser melting on the metal powder. A patterned dielectric layer separates the first and second metal layers and the magnetic core.

3-dimensional printing process for integrated magnetics

Integrated circuits and methods of producing the same are provided. In an exemplary embodiment, a method of producing an integrated circuit includes forming a lower conductor element overlying a substrate, and forming a magnetic stack layer overlying the lower conductor element. A waste portion of the magnetic stack layer is removed with a wet etchant to produce a magnetic core. The wet etchant includes hydrofluoric acid, a second acid different than the hydrofluoric acid, an oxidizer, and a solvent.

Methods for producing integrated circuits with magnets and a wet etchant for the same

Integrated circuits and coupled inductors with isotropic magnetic cores, and methods for fabricating integrated circuits and coupled inductors with isotropic magnetic cores are provided. In an embodiment, a method for fabricating an integrated circuit is provided. The method includes providing a semiconductor substrate and forming an isotropic magnetic core bottom yoke over the semiconductor substrate. Further, the method includes forming an inductor coil over the isotropic magnetic core bottom yoke. Also, the method includes forming isotropic magnetic core sidewalls over the isotropic magnetic core bottom yoke and around the inductor coil. The method includes forming an isotropic magnetic core top yoke over the isotropic magnetic core sidewalls and over the inductor coil.

Integrated circuits and coupled inductors with isotropic magnetic cores, and methods for fabricating the same

Integrated circuits and coupled inductors with isotropic magnetic cores, and methods for fabricating integrated circuits and coupled inductors with isotropic magnetic cores are provided. In an embodiment, a coupled inductor includes a first inductor coil arranged around a coil center and a second inductor coil arranged around the coil center. The second inductor coil is interleaved with the first inductor coil, and the first and second inductor coils form an interleaved inductor coil. The coupled inductor further includes an isotropic magnetic core surrounding a portion of the interleaved inductor coil and passing through the coil center.

Devices and methods of forming a device are disclosed. The method includes providing a wafer that includes a center insulator layer sandwiched by a top substrate and a bottom substrate. Both sides of the wafer are patterned and etched in sequence to form deep trenches in both substrates. A conductive seed layer is formed on both sides of the wafer in sequence to cover all exposed areas. Both sides of the wafer are electroplated simultaneously to fill both deep trenches with a conductive material. Both sides of the wafer are polished in sequence to form a coplanar surface. A protective layer is deposited on both sides of the wafer in sequence. Selective portions of the protective layer on both sides are patterned and etched in sequence to expose micro bump bonding areas. Micro bumps are formed on both sides of the wafer in sequence to facilitate electrical connection.

High voltage device

Magnetic core inductors implemented on integrated circuits and methods for fabricating such magnetic core inductors are disclosed. An exemplary magnetic core inductor includes a bottom magnetic plate that includes a center portion and first, second, third, and fourth extension portions extending from the center portion. The exemplary magnetic core inductor includes an interlayer dielectric layer disposed over the bottom magnetic plate, and within the interlayer dielectric layer, first, second, third, and fourth via trenches extending above a respective one of the first, second, third, and fourth extension portions, and a fifth via trench extending above the center portion. The magnetic core inductor further includes a stacked-ring inductor coil including a plurality of inductor rings surrounding the fifth via trench and a top magnetic plate including a center portion and first, second, third, and fourth extension portions extending from the center portion.

Growing community of inventors

Singapore, Singapore

Lulu Peng