Sensirion Ag

Lukas Rüthemann

Frank Gütle

Werner Hunziker

David Pustan

Lukas Hoppenau

Marcel Mittelmueller

Frank Guetle

An optical component () can include a chip comprising a carrier substrate () made of a semiconductor material and a membrane () disposed on a planar membrane-carrying surface of the carrier substrate (). The membrane () is formed integrally with the carrier substrate (). A cavity () is formed in the carrier substrate (), the cavity having a first end and a second end. The membrane () has a cavity-spanning portion that spans the cavity () at its first end. The cavity-spanning portion of the membrane () is transparent to light in a desired wavelength range. An optical element () for shaping, diffusing, or filtering the light is formed on or in the cavity-spanning portion of the membrane (). The optical component () may be manufactured in a wafer-level process. Also disclosed is an optoelectronic module that includes the optical component () together with an optoelectronic device.

Optical component, optoelectronic module and method of manufacture

A particulate matter (PM) sensor comprises a substrate forming a cavity (), the substrate comprising a semiconductor chip (), and a light source () arranged in the cavity (). The light source () is adapted to emit a light beam (). The light beam () forms a detection volume () for particulate matter () outside the cavity (). Optionally, the particulate matter sensor comprises an optical element () delimiting the cavity () at one end. The optical element () is configured to shape the light beam (). Further, the particulate matter sensor comprises at least one photodetector () that is integrated into a surface of the semiconductor chip (). The surface into which the at least one photodetector () is integrated faces the detection volume (). The at least one photodetector () is adapted to detect light () scattered by particulate matter () in the detection volume ().

Integrated particulate matter sensor with cavity

Growing community of inventors

Stäfa, Switzerland

Lukas Rüthemann