Sensirion Ag

Lukas Hoppenau

Markus Graf

Werner Hunziker

Stephan Braun

Frank Gütle

David Pustan

Lukas Rüthemann

Tobias Schmid

Lukas Winkler

Pascal Hunziker

Markus Wiget

Frank Guetle

Michael GÖTZE

A particulate matter (PM) sensor comprises a substrate forming a cavity (), the substrate comprising a semiconductor chip (), and a light source () arranged in the cavity (). The light source () is adapted to emit a light beam (). The light beam () forms a detection volume () for particulate matter () outside the cavity (). Optionally, the particulate matter sensor comprises an optical element () delimiting the cavity () at one end. The optical element () is configured to shape the light beam (). Further, the particulate matter sensor comprises at least one photodetector () that is integrated into a surface of the semiconductor chip (). The surface into which the at least one photodetector () is integrated faces the detection volume (). The at least one photodetector () is adapted to detect light () scattered by particulate matter () in the detection volume ().

Integrated particulate matter sensor with cavity

An electronic component comprises a carrier (), a sensor device () mounted on the carrier (), which sensor device () comprises a sensor chip (), and an electrostatic discharge protection element () for protecting the sensor chip () from an electrostatic discharge, which protection element () is mounted on the carrier ().

Electronic component including sensor device and method of manufacturing same

Growing community of inventors

Stafa, Switzerland

Lukas Hoppenau