Nanosurf Ag

Nuomedis Ag

Artidis Ag

Lukas Emanuel Howald

Terunobu Akiyama

Robert Sum

Urs Matter

Urs Staufer

Loris Scandella

This invention concerns scanning probe microscopes and related instruments ('SPMs') when used to investigate or measure large samples whose size is a multiple of the typical operational scanning area of an SPM, say 150 &#x3bc;m&#xd7;150 &#x3bc;m at most. To avoid frequent readjustments or other time-consuming human interaction and errors when focusing the SPM, a multi-step, automated method for the SPM-scanning of large samples is disclosed, comprising a 'coarse', i.e. low resolution, non-SPM scanning or mapping step adapted to scan a large sample and providing an integral map of the sample, followed by a preferably mathematical evaluation step identifying areas of interest of the sample, which areas are then subjected to a focused &#x201c;fine&#x201d; raster scanning step by the SPM with high resolution. The associated apparatus provides the means to execute this novel three-step process.

Method and apparatus for automated scanning probe microscopy

The optical detection system typically used in micromechanical cantilever-based instruments, e.g. scanning probe microscopes, chemical or biological sensing probes like 'artificial noses', or molecular force probe instruments, can hardly cope when measuring samples immersed in a fluid, i.e. a gas, gel, or liquid having another refractive index than the environment. Optical readout or detection becomes problematic as soon as the refractive index of the fluid changes, because signals can shift significantly. The invention provides an improved optical means at the interface between the fluid and the environment, avoiding signal shifts, and thus avoiding time-consuming and difficult re-calibration or re-adjustment of the microscope or other cantilever-based instrument.

Raster scanning microscope having transparent optical element with inner curved surface

The invention relates to so-called scanning tips of probes necessary for scanning a measured object, in particular in scanning force microscopes and other scanning microscopes, so-called scanning probe microscopes. The possible resolution of such microscopes depends primarily on the fineness of the tip, i.e. its curvature or radius being as small as possible. According to the invention, a photostructurable material, e.g. a photosensitive resists, serves as the material for the scanning tip which is exposed via a mask and is subsequently developed/hardened in a manner known per se. The unexposed parts of the photosensitive resist are removed as usual. By the shape of the exposure mask, the preferably directed exposure of the photosensitive resist, and the subsequent hardening, a tip is formed preferably laterally on or at a carrier, usually made from a different material, which is provided with a very small radius, thus very well suitable for scanning probe microscopy and similar applications. By an appropriate selection of the mask and/or the exposure angle, the geometry of the tip can be controlled, in particular its bending radius and edge angle, for other applications as well, e.g. for measuring scanners or profile meters.

Scanning tip and process for its production and use, particularly for a scanning probe microscope

Finely adjustable actuators are used for positioning a sensor or a scanning tip, especially for scanning tunnelling microscopes and other scanning microscopes, i.e. scanning probe microscopes. The invention relates to the construction of such an actuator which can carry out three-dimensional movements of a scanning tip with high regulating accuracy while being of robust and compact design. This is achieved by a sensible arrangement of a plural number of electromagnetic actuator elements acting on a common rigid sensor carrier. The invention provides a robust and relatively simple solution for positioning the scanning tip; an important and problematic task in scanning probe microscopy and in related fields. It permits positioning at high resolution as well as with a relatively long regulating range. Further advantages include good repetition accuracy and little mass which reduces both energy consumption and interference.

Growing community of inventors

Dornach, Switzerland

Lukas Emanuel Howald