Sensirion Ag

Lukas Buergi

Nicolas Moeller

Cyrill Kuemin

The sensor device comprises a hotplate on a membrane. The hotplate is heated by a N-fold rotationally symmetric heater structure having N&#x3e;1 heater elements of identical design. Each heater element comprises an inner section, an intermediate section and an outer section arranged in series, with the inner section having a larger electrical cross section than the outer section. This design allows to heat the hotplate to a homogeneous temperature at moderate supply voltages.

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Zurich, Switzerland

Lukas Buergi