Semiconductor Manufacturing International (shanghai) Corporation

Lujun Zou

Yun Yang

Shengfen Chiu

Shaobin Li

A method for manufacturing a semiconductor device may include the following steps: preparing a stacked structure; processing the stacked structure to form a first gate structure and a preliminary structure; forming a dielectric material layer that covers at least the first gate structure; forming a dielectric layer using the dielectric material layer, such that a portion of the dielectric layer is positioned between the first gate structure and the preliminary structure; performing an annealing process on at least one of the dielectric material layer and the dielectric layer; processing the preliminary structure to form a second gate structure; and after the annealing process has been performed, forming a first metal silicide member on the second gate structure and/or forming a second metal silicide member on an active region associated with the second gate structure.

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Shanghai, China

Lujun Zou