Changxin Memory Technologies, Inc.

Luguang Wang

Xiaoling Wang

Heng-Chia Chang

Jinrong Huang

Embodiments provide a semiconductor structure and a method for fabricating the same. The semiconductor structure includes: a substrate; bit lines positioned in the substrate, where each of the bit lines includes a conductive body and a dielectric layer, the conductive body includes a body portion and a plurality of contact portions, the body portion extend along a first direction, the contact portions protrude from a side surface of the body portion facing away from a bottom of the substrate, the contact portions are arranged at intervals along the first direction, and the dielectric layer covers side wall surfaces on left and right sides of the body portion along an extension direction; and transistors positioned on top surfaces of the contact portions facing away from the body portion, and extension directions of channels of the transistors are perpendicular to a plane where the substrate is positioned.

Semiconductor structure and method for fabricating same

A semiconductor structure includes: a substrate; bit lines located in the substrate and including a main body and a plurality of contact portions, the main body extending in a first direction, the contact portions being connected to the main body and extending toward the top surface of the substrate, and the plurality of contact portions being arranged at intervals in the first direction; and transistors located on a top surface of the contact portion, the extension direction of a channel of the transistor being perpendicular to a plane where the substrate is located.

Semiconductor structure and method for manufacturing same

A semiconductor structure includes: a base, including a substrate and a dielectric layer, the substrate being provided with a first front surface and a first back surface which are opposite, and the dielectric layer being located at the first front surface; a connecting hole, penetrating through the substrate and extending into the dielectric layer; a first insulating layer, located at the surface of an inner wall of the connecting hole; a protective barrier layer, located at the surface of the first insulating layer and grounded; a second insulating layer, located at the surface of the protective barrier layer; and a connecting structure, located at the surface of the second insulating layer and filling up the connecting hole.

Semiconductor structure with an air gap, method for forming same, and stacked structure

A semiconductor structure and a method for manufacturing a semiconductor structure are provided. The semiconductor structure includes: a first base with a first surface, in which a conductive pillar is arranged in the first base, the first surface includes a first groove, and the first groove exposes a top surface and a portion of a sidewall of the conductive pillar; a second base with a second surface, in which the first surface is bonded to the second surface, the second surface includes a second groove, an electrical connection pillar is arranged in the second base, the electrical connection pillar is located in the second groove, and the electrical connection pillar protrudes from the second surface; and an electrical connection structure, in which the electrical connection structure and a portion of the electrical connection pillar are embedded into the first groove.

Semiconductor package and method of manufacturing semiconductor package

A word-line drive circuit, a word-line driver and a storage device are provided. The word-line drive circuit includes at least two SWDs. Each SWD is connected to an MWL for providing an enable signal and a sub word line. The SWD includes a holding transistor. A first end and a second end of the holding transistor are respectively connected to different sub word lines, and a gate receives a second drive signal. The SWD is configured to provide a first drive signal to a selected sub word line in response to the first drive signal and the enable signal, the selected sub word line being a sub word line connected to the first end or second end of the holding transistor, and to conduct the first end and the second end of the holding transistor in response to the first drive signal, the enable signal and the second drive signal.

Word-line drive circuit, word-line driver and storage device

The present application provides a semiconductor structure and a manufacturing method thereof. The method of manufacturing the semiconductor structure includes: providing a base, the base including a substrate and a first dielectric layer on the substrate; forming a through silicon via in the base, the through silicon via penetrating through the first dielectric layer, extending into the substrate, and having a depth less than a thickness of the base; forming an electrically conductive structure in the through silicon via; forming a filling hole in the first dielectric layer and the substrate, the filling hole surrounding the electrically conductive structure, exposing a sidewall of the electrically conductive structure and a part of the substrate, and having a stepwise sidewall; and forming a thermally conductive structure in the filling hole.

Semiconductor structure and manufacturing method thereof

Embodiments of the disclosure disclose a semiconductor device and a method manufacturing thereof. The semiconductor device includes a substrate as well as a first groove and a second groove located in the substrate, in which the second groove is formed by etching the substrate downwards from part of a bottom surface of the first groove, and a sidewall of the second groove retracts inward by a preset length relative to a sidewall of the first groove; a word layer including a first sub-portion located in the second groove and a second sub-portion located in the first groove, in which a gap is provided between a sidewall of the second sub-portion and that of the first groove; and a word line cover layer located in the first groove and covering the second sub-portion, in which an air gap structure at least located at the gap is provided in the word line cover layer.

Semiconductor device including air gap structure above word line

A word line driver includes a PMOS area, a NMOS area, first gates, and second gates. The PMOS area includes first active areas extending along a first direction. The first active area includes a first channel area, a first source area and a first drain area. The NMOS area includes second active areas. The second active area includes a second channel area, a second source area, a second drain area, a third channel area, a third source area, and a third drain area. The extension direction of the first gate corresponding to the first active area is inclined compared with the first direction. The second gate covers the third channel area. The second gate, the third source area and the third drain area constitute a holding transistor.

Word line driver and memory device

Disclosed are a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a base, including a substrate and a dielectric layer, where the substrate includes a front surface and a back surface that are opposite to each other; the dielectric layer is formed on the front surface; the base is provided with a via hole; the via hole penetrates the substrate from the back surface of the substrate and extends to the dielectric layer; an insulating layer, located on an inner wall surface of the via hole; and a conductive structure, where the conductive structure includes a first conductive layer and a second conductive layer connected to each other; the first conductive layer is close to a bottom of the via hole, and the second conductive layer is close to a top of the via hole.

Semiconductor structure, manufacturing method of semiconductor structure and stacked structure

A semiconductor structure includes: a substrate and a dielectric layer, in which the substrate has a front surface and a back surface which are oppositely arranged, and the dielectric layer is formed on the front surface; a connecting hole, penetrating through the substrate and extending to the dielectric layer; an insulating layer, located on the surface of the inner wall of the connecting hole; and a connecting structure, comprising a first barrier layer, a second barrier layer and a conductive structure, in which the first barrier layer is located on a surface of the insulating layer, the second barrier layer is located between the first barrier layer and the conductive structure, and an air gap exists between the second barrier layer and the first barrier layer.

Semiconductor structure, method for forming same and stacked structure

A semiconductor structure includes: a substrate; a through silicon via structure that is located in the substrate; a first heat dissipation layer that is around a side wall of the through silicon via structure, and a material of which is a metal semiconductor compound; and a second heat dissipation layer that is around the side wall of the through silicon via structure and located between the first heat dissipation layer and the through silicon via structure, and a heat conductivity of which is greater than a heat conductivity of the first heat dissipation layer.

A semiconductor structure includes: a base including a substrate and a dielectric layer, herein the substrate having a front surface and a back surface that are oppositely arranged, and the dielectric layer is located on the front surface; a connecting hole penetrating the substrate and extending to the dielectric layer; a connecting structure, located in the connecting hole; and an insulating structure, located between the connecting structure and the inner wall of the connecting hole. The insulating structure, the inner wall of the connecting hole, and the connecting structure define an air gap.

Semiconductor structure and method for forming same

The present disclosure provides a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a base, the base including a substrate and a first heat dissipation structure located in the substrate, heat conductivity of the first heat dissipation structure being higher than that of the substrate, the substrate including an upper surface and a lower surface opposite to each other, and a surface of the first heat dissipation structure being exposed on the upper surface of the substrate; a second heat dissipation structure, the second heat dissipation structure being at least located on an upper surface of the first heat dissipation structure; and a through silicon via (TSV) structure, the TSV structure penetrating through an entire thickness of the second heat dissipation structure and extending into the base, the second heat dissipation structure surrounding the TSV structure, and the first heat dissipation structure surrounding the TSV structure.

Provided are a heat dissipation structure, a method for forming a heat dissipation structure, and a semiconductor structure. The heat dissipation structure includes a first heat dissipation ring and a second heat dissipation ring. The first heat dissipation ring is formed in a dielectric layer around a Through Silicon Via (TSV) and in contact with the TSV. The TSV passes through a silicon substrate and the dielectric layer. The second heat dissipation ring is formed around the first heat dissipation ring, and in contact with the first heat dissipation ring. The second heat dissipation ring has a heat dissipation gap within it. A dimension of the second heat dissipation ring in a first direction is less than that of the first heat dissipation ring in the first direction. The first direction is a thickness direction of the silicon substrate.

Heat dissipation structure, method for forming heat dissipation structure, and semiconductor structure

A semiconductor structure includes: a first base having a first face, a second base having a second face and a welded structure. The first base is provided with an electrical connection column protruding from the first face. A conductive column is provided in the second base, and a first groove and a second groove are further provided at the second face. The first groove is located above the conductive column, and the second groove exposes at least part of a side surface of the conductive column. The protruding portion of the electrical connection column is located in the second groove, and part of a side surface of the electrical connection column and part of the side surface of the conductive column overlap in staggered way in a direction perpendicular to the first face or the second surface. At least part of the welded structure is filled in the first groove.

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Hefei, China

Luguang Wang