Hoechst Aktiengesellschaft

Institut Fuer Mikrotechnik Gmbh

Ludwig Giebel

Martin Bruck

Tilo Vaahs

Wolfgang Ehrfeld

Manfred Lacher

Wolfgang Bocker

A process for producing a ceramic having a microstructured surface with a surface profile depth of less than 1 micron, measured by the atomic force microscopy, comprising preparing a polymeric precursor material, shaping the precursor material into a structured mold insert of an inherently stable mold insert material having a structured surface geometry corresponding with the microstructured surface of the ceramic to form a shaped precursor material, the shaped precursor material being rendered infusible by chemical crosslinking, and wherein the inherently stable mold insert material is selected from materials having sufficient strength for structuring and high molding accuracy, and pyrolyzing the shaped precursor material, whereby the ceramic having the microstructured surface is obtained.

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Mainz, Germany

Ludwig Giebel