Average Co-Inventor Count = 2.40
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Steag Micro Tech Gmbh (1 from 30 patents)
2. Steag Hamatech Ag (1 from 20 patents)
2 patents:
1. 6612558 - Apparatus for fixing substrates
2. 5879464 - Method and device for wet-processing substrates in a vessel