Commissariat a L'energie Atomique Et Aux Energies Alternatives

Commissariat À L'énergie Atomique Et Aux Énergies Alternatives

Ludovic Dupre

Adrien Gasse

Patrick Le Maitre

Amélie Dussaigne

Carole Pernel

Marion Volpert

Marianne Consonni

Emilie Dussaigne

Hélène Fournier

Franck Henry

Fabian Rol

A method for manufacturing a native emission matrix, comprising the following steps: a) providing a base structure comprising a substrate, a layer of GaN, a layer of doped In(x)GaN and an epitaxial regrowth layer of nid In(x)GaN, b) structuring first and second mesas in the base structure, the first mesa comprising a part of the layer of GaN, the layer of doped In(x)GaN and the epitaxial regrowth layer of not-intentionally doped In(x)GaN, the second mesa comprising a part of the layer of doped In(x)GaN and the epitaxial regrowth layer of not-intentionally doped In(x)GaN, c) electrochemically porosifying the second mesa, d) producing stacks on the mesas to form LED structures emitting at various wavelengths.

Method for manufacturing a native emission matrix having doped and porosified In(x)GaN

Photo-emitting and/or photo-receiving diode array device, comprising:

Photo-emitting and/or photo-receiving diode array device

A method for producing a photo-emitting and/or photo-receiving device with a metal optical separation grid, comprising at least:

Method for producing a photo-emitting and/or photo-receiving device with a metal optical separation grid

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Grenoble, France

Ludovic Dupre