Centre National De La Recherche Scientifique

Oxford Instruments Asylum Research Inc

Université Claude Bernanrd Lyon 1

Ecole Normale Suérieure De Lyon

Ludovic Bellon

Aleks Labuda

Basile Pottier

An atomic force microscope ('AFM') based interferometer, uses a light source, and a splitting optical interface, splitting the light beam into a signal light beam and a reference light beam. Both the signal and reference light beams are focused in the vicinity of an AFM cantilever. A beam displacer introduces a lateral displacement between the signal light beam and reference light beam, the lateral displacement being such that, in at least one plane between the beam displacer and the focusing lens structure, the center of the signal light beam is separated from the center of the reference light beam by more than half a sum of their beam diameters on that plane. A detector operates to determine differences in optical path length between the signal light beam and reference light beam to determine information about movement of the cantilever.

Growing community of inventors

Le Bois-d'Oingt, France

Ludovic Bellon