Carl-zeiss-smt Ag

Ludo Mathussen

Ulrich Wegmann

Wolfgang Emer

Markus Mengel

Albrecht Ehrmann

Reiner Clement

A measuring system () for the optical measurement of an optical imaging system (), which is provided to image a pattern arranged in an object surface () of the imaging system in an image surface () of the imaging system, comprises an object-side structure carrier () having an object-side measuring structure (), to be arranged on the object side of the imaging system; an image-side structure carrier () having an image-side measuring structure (), to be arranged on the image side of the imaging system; the object-side measuring structure and the image-side measuring structure being matched to each other in such a way that, when the object-side measuring structure is imaged onto the image-side measuring structure with the aid of the imaging system, a superposition pattern is produced; and a detector () for the locally resolving acquisition of the superposition pattern. The imaging system is designed as an immersion system for imaging with the aid of an immersion liquid (). A structure carrier to be arranged in the region of the immersion liquid is assigned a protective system () in order to increase the resistance of the measuring structure to degradation caused by the immersion liquid. A measurement of immersion systems under immersion conditions is thereby possible without detrimental influence of the immersion liquid on the measuring accuracy.

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Schwaebisch Gmuend, Germany

Ludo Mathussen