Rca Inc.

Lucian Anthony Barton

Daniel Louis Ross

Recording media comprising a mixture of 4,4'-bis(3-diazo-3,4-dihydro-4-oxo-1-naphthalenesulfonyloxy)benzil and an alkali soluble resin are suitable for recording information with electron beams. These recording media have high sensitivity, high resolving power and can be reproducibly formulated.

Electron beam recording media containing

A method of purifying crude 2,4-bis(6-diazo-5,6-dihydro-5-oxo-1-naphthalenesulfonyloxy)benzophenone by dissolving in an organic solvent, reprecipitating by adding certain nonsolvents and recrystallizing the reprecipitated product from certain solvents.

Method of purifying

Method of recording information in which the electron beam sensitive

The development of an exposed electron beam sensitive resist film in a two-stage process, rather than in a single stage, with a water wash between stages, improves the sensitivity and resolution that can be achieved for the resist.

Process for improved development of electron-beam-sensitive resist films

Recording media comprising a mixture of 2,4-bis(6-diazo-5,6-dihydro-5-oxo-1-napthalenesulfonyloxy)-benzophenone and an alkaki soluble resin are suitable for recording information with electron beams. These recording media have high sensitivity, high resolving power and can be reproducibly formulated.

Growing community of inventors

Trenton, NJ, United States of America

Lucian Anthony Barton