Robert Boschgmbh

Luca Valli

Andrea Visconti

Francesco Diazzi

A rotation rate sensor, including at least: one oscillating mass, deflectable in a drive direction and in a detection direction oriented perpendicularly to the drive direction; one drive circuit for prompting a defined oscillatory movement of the oscillating mass in the drive direction; one circuit for detecting a measuring signal, which corresponds to the deflection of the oscillating mass in the detection direction; and one read-out circuit for reading out and pre-processing the measuring signal. The read-out circuit includes a demodulator, with which a useful signal and a quadrature signal are extractable from the measuring signal. The read-out circuit includes a sigma-delta A/D converter. An offset voltage is feedable to the sigma-delta A/D converter, which is selected in such a way that tonal artifacts in the frequency spectrum of the digitized useful signal are shifted into a frequency range outside of the bandwidths of the useful signal to be expected.

Rotation rate sensor and method for operating a rotation rate sensor

A method for operating a capacitive MEMS sensor. The method includes: supplying a defined electrical potential on a deflectably mounted, seismic mass of the MEMS sensor; capacitively inducing a vibrational motion of the seismic mass with the aid of a clocked electrical control voltage; compensating for fluctuations in the supplied electrical potential on the seismic mass caused by the clocked electrical control voltage, by selectively charging and/or discharging an electrical storage element connected to the seismic mass in accordance with the frequency of the clocked electrical control voltage.

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Munich, Germany

Luca Valli